JPS5537100B2 - - Google Patents
Info
- Publication number
- JPS5537100B2 JPS5537100B2 JP4954176A JP4954176A JPS5537100B2 JP S5537100 B2 JPS5537100 B2 JP S5537100B2 JP 4954176 A JP4954176 A JP 4954176A JP 4954176 A JP4954176 A JP 4954176A JP S5537100 B2 JPS5537100 B2 JP S5537100B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4954176A JPS52132783A (en) | 1976-04-30 | 1976-04-30 | Electron ray exposure unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4954176A JPS52132783A (en) | 1976-04-30 | 1976-04-30 | Electron ray exposure unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52132783A JPS52132783A (en) | 1977-11-07 |
| JPS5537100B2 true JPS5537100B2 (pt) | 1980-09-25 |
Family
ID=12834036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4954176A Granted JPS52132783A (en) | 1976-04-30 | 1976-04-30 | Electron ray exposure unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52132783A (pt) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5357761A (en) * | 1976-11-04 | 1978-05-25 | Fujitsu Ltd | Electron beam exposure apparatus |
-
1976
- 1976-04-30 JP JP4954176A patent/JPS52132783A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52132783A (en) | 1977-11-07 |