JPS5536975B2 - - Google Patents
Info
- Publication number
- JPS5536975B2 JPS5536975B2 JP1351373A JP1351373A JPS5536975B2 JP S5536975 B2 JPS5536975 B2 JP S5536975B2 JP 1351373 A JP1351373 A JP 1351373A JP 1351373 A JP1351373 A JP 1351373A JP S5536975 B2 JPS5536975 B2 JP S5536975B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1351373A JPS5536975B2 (enrdf_load_stackoverflow) | 1973-02-02 | 1973-02-02 | |
| DE19742423961 DE2423961A1 (de) | 1973-02-02 | 1974-01-31 | Polymerisierbare ungesaettigte verbindungen |
| DE2404589A DE2404589A1 (de) | 1973-02-02 | 1974-01-31 | Reaktionsfaehige hochpolymere verbindung, verfahren zu deren herstellung und massen, die sie enthalten |
| US05/439,673 US3931248A (en) | 1973-02-02 | 1974-02-04 | Reactive high polymer compound |
| US05/586,776 US4041017A (en) | 1973-02-02 | 1975-06-13 | Reactive light-sensitive high polymer compound containing furyl pentadienic ester groups and insolubilized by action of heat, light or electron beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1351373A JPS5536975B2 (enrdf_load_stackoverflow) | 1973-02-02 | 1973-02-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49103619A JPS49103619A (enrdf_load_stackoverflow) | 1974-10-01 |
| JPS5536975B2 true JPS5536975B2 (enrdf_load_stackoverflow) | 1980-09-25 |
Family
ID=11835214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1351373A Expired JPS5536975B2 (enrdf_load_stackoverflow) | 1973-02-02 | 1973-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5536975B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56122028A (en) * | 1980-02-29 | 1981-09-25 | Daicel Chem Ind Ltd | Alkali-soluble photosensitive resin composition |
| JPS57105735A (en) * | 1980-12-23 | 1982-07-01 | Daicel Chem Ind Ltd | Photosensitive image-forming material |
| JPS5821735A (ja) * | 1981-07-31 | 1983-02-08 | Daicel Chem Ind Ltd | アルカリ現像可能な感光性樹脂組成物 |
| JP7752522B2 (ja) * | 2020-12-09 | 2025-10-10 | 住友化学株式会社 | レジスト組成物及びレジストパターンの製造方法 |
-
1973
- 1973-02-02 JP JP1351373A patent/JPS5536975B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49103619A (enrdf_load_stackoverflow) | 1974-10-01 |