JPS5536269B2 - - Google Patents
Info
- Publication number
- JPS5536269B2 JPS5536269B2 JP9839275A JP9839275A JPS5536269B2 JP S5536269 B2 JPS5536269 B2 JP S5536269B2 JP 9839275 A JP9839275 A JP 9839275A JP 9839275 A JP9839275 A JP 9839275A JP S5536269 B2 JPS5536269 B2 JP S5536269B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9839275A JPS5221222A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing solution for copper and its alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9839275A JPS5221222A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing solution for copper and its alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5221222A JPS5221222A (en) | 1977-02-17 |
| JPS5536269B2 true JPS5536269B2 (online.php) | 1980-09-19 |
Family
ID=14218562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9839275A Granted JPS5221222A (en) | 1975-08-13 | 1975-08-13 | Chemical polishing solution for copper and its alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221222A (online.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002050595A (ja) | 2000-08-04 | 2002-02-15 | Hitachi Ltd | 研磨方法、配線形成方法及び半導体装置の製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5332340B2 (online.php) * | 1973-02-09 | 1978-09-07 |
-
1975
- 1975-08-13 JP JP9839275A patent/JPS5221222A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5221222A (en) | 1977-02-17 |