JPS5221222A - Chemical polishing solution for copper and its alloy - Google Patents

Chemical polishing solution for copper and its alloy

Info

Publication number
JPS5221222A
JPS5221222A JP9839275A JP9839275A JPS5221222A JP S5221222 A JPS5221222 A JP S5221222A JP 9839275 A JP9839275 A JP 9839275A JP 9839275 A JP9839275 A JP 9839275A JP S5221222 A JPS5221222 A JP S5221222A
Authority
JP
Japan
Prior art keywords
alloy
copper
chemical polishing
polishing solution
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9839275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5536269B2 (online.php
Inventor
Tadaaki Marushima
Tooru Hayakawa
Yukitomo Gotou
Kenji Ishii
Itaru Iketani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP9839275A priority Critical patent/JPS5221222A/ja
Publication of JPS5221222A publication Critical patent/JPS5221222A/ja
Publication of JPS5536269B2 publication Critical patent/JPS5536269B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP9839275A 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy Granted JPS5221222A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9839275A JPS5221222A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9839275A JPS5221222A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Publications (2)

Publication Number Publication Date
JPS5221222A true JPS5221222A (en) 1977-02-17
JPS5536269B2 JPS5536269B2 (online.php) 1980-09-19

Family

ID=14218562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9839275A Granted JPS5221222A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Country Status (1)

Country Link
JP (1) JPS5221222A (online.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6562719B2 (en) 2000-08-04 2003-05-13 Hitachi, Ltd. Methods of polishing, interconnect-fabrication, and producing semiconductor devices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104840A (online.php) * 1973-02-09 1974-10-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104840A (online.php) * 1973-02-09 1974-10-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6562719B2 (en) 2000-08-04 2003-05-13 Hitachi, Ltd. Methods of polishing, interconnect-fabrication, and producing semiconductor devices
US6750128B2 (en) 2000-08-04 2004-06-15 Renesas Technology Corporation Methods of polishing, interconnect-fabrication, and producing semiconductor devices

Also Published As

Publication number Publication date
JPS5536269B2 (online.php) 1980-09-19

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