JPS5536267B2 - - Google Patents
Info
- Publication number
- JPS5536267B2 JPS5536267B2 JP14476875A JP14476875A JPS5536267B2 JP S5536267 B2 JPS5536267 B2 JP S5536267B2 JP 14476875 A JP14476875 A JP 14476875A JP 14476875 A JP14476875 A JP 14476875A JP S5536267 B2 JPS5536267 B2 JP S5536267B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14476875A JPS5268037A (en) | 1975-12-03 | 1975-12-03 | Method of and apparatus for regenerating etching liquid of copper chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14476875A JPS5268037A (en) | 1975-12-03 | 1975-12-03 | Method of and apparatus for regenerating etching liquid of copper chloride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5268037A JPS5268037A (en) | 1977-06-06 |
| JPS5536267B2 true JPS5536267B2 (OSRAM) | 1980-09-19 |
Family
ID=15369952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14476875A Granted JPS5268037A (en) | 1975-12-03 | 1975-12-03 | Method of and apparatus for regenerating etching liquid of copper chloride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5268037A (OSRAM) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5421875B2 (OSRAM) * | 1971-10-06 | 1979-08-02 |
-
1975
- 1975-12-03 JP JP14476875A patent/JPS5268037A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5268037A (en) | 1977-06-06 |