JPS5268037A - Method of and apparatus for regenerating etching liquid of copper chloride - Google Patents

Method of and apparatus for regenerating etching liquid of copper chloride

Info

Publication number
JPS5268037A
JPS5268037A JP14476875A JP14476875A JPS5268037A JP S5268037 A JPS5268037 A JP S5268037A JP 14476875 A JP14476875 A JP 14476875A JP 14476875 A JP14476875 A JP 14476875A JP S5268037 A JPS5268037 A JP S5268037A
Authority
JP
Japan
Prior art keywords
etching liquid
copper chloride
regenerating etching
regenerating
chloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14476875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5536267B2 (OSRAM
Inventor
Masahiro Yamazaki
Hisao Tsutsumi
Katsutoshi Yanamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP14476875A priority Critical patent/JPS5268037A/ja
Publication of JPS5268037A publication Critical patent/JPS5268037A/ja
Publication of JPS5536267B2 publication Critical patent/JPS5536267B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP14476875A 1975-12-03 1975-12-03 Method of and apparatus for regenerating etching liquid of copper chloride Granted JPS5268037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14476875A JPS5268037A (en) 1975-12-03 1975-12-03 Method of and apparatus for regenerating etching liquid of copper chloride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14476875A JPS5268037A (en) 1975-12-03 1975-12-03 Method of and apparatus for regenerating etching liquid of copper chloride

Publications (2)

Publication Number Publication Date
JPS5268037A true JPS5268037A (en) 1977-06-06
JPS5536267B2 JPS5536267B2 (OSRAM) 1980-09-19

Family

ID=15369952

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14476875A Granted JPS5268037A (en) 1975-12-03 1975-12-03 Method of and apparatus for regenerating etching liquid of copper chloride

Country Status (1)

Country Link
JP (1) JPS5268037A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843791A (OSRAM) * 1971-10-06 1973-06-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843791A (OSRAM) * 1971-10-06 1973-06-23

Also Published As

Publication number Publication date
JPS5536267B2 (OSRAM) 1980-09-19

Similar Documents

Publication Publication Date Title
JPS5220766A (en) Method of removing phtoresist layer and processing apparatus thereof
IL49224A0 (en) Method and apparatus for centrifugal processing of liquid
JPS5243782A (en) Method and apparatus for separating fluid and method of manufacturing apparatus
JPS52120772A (en) Method of etching and apparatus therefor
GB1542951A (en) Method and apparatus for treatment of fluorine-containing water
JPS51126176A (en) Method of and apparatus for detecting liquid level
JPS5232853A (en) Method and device for removing slag from liquid
JPS5252121A (en) Method of removing copper from crude lead and apparatus therefor
JPS5210914A (en) Method of transferring fluids and apparatus therefor
JPS5299383A (en) Method of and apparatus for
JPS51112893A (en) Method of making polyvinyl chloride and apparatus therefor
JPS52105659A (en) Method of and apparatus for treating liquid
JPS5222980A (en) Method of and apparatus for analyzing surface
JPS5256034A (en) Mechanical and chemical etching method and apparatus therefor
JPS5235705A (en) Method and apparatus of hydrometallurgy
JPS5276092A (en) Method of and apparatus for analyzing water
JPS5222535A (en) Method of and apparatus for electroo chemically etching works of conductive material
JPS5465878A (en) Method of and apparatus for separating sludge from liquid
JPS51143883A (en) Method of and apparatus for terminating conductor
JPS51142517A (en) Method and apparatus of recovering enbryo from embryoocontaining egg
JPS5218703A (en) Method of removing solid from liquid hydrocarbon
JPS5218219A (en) Method of removing coatings and apparatus therefor
JPS539007A (en) Method of and apparatus for treating sludge
JPS5268037A (en) Method of and apparatus for regenerating etching liquid of copper chloride
JPS5262209A (en) Removing method of monochloroacetylene in chlorinated hydrocarbon