JPS5536183B2 - - Google Patents
Info
- Publication number
- JPS5536183B2 JPS5536183B2 JP11605573A JP11605573A JPS5536183B2 JP S5536183 B2 JPS5536183 B2 JP S5536183B2 JP 11605573 A JP11605573 A JP 11605573A JP 11605573 A JP11605573 A JP 11605573A JP S5536183 B2 JPS5536183 B2 JP S5536183B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11605573A JPS5536183B2 (en:Method) | 1973-10-15 | 1973-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11605573A JPS5536183B2 (en:Method) | 1973-10-15 | 1973-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5067578A JPS5067578A (en:Method) | 1975-06-06 |
| JPS5536183B2 true JPS5536183B2 (en:Method) | 1980-09-19 |
Family
ID=14677573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11605573A Expired JPS5536183B2 (en:Method) | 1973-10-15 | 1973-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5536183B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5246903A (en) * | 1975-10-08 | 1977-04-14 | Mitsubishi Electric Corp | Rotary coating apparatus |
| JPS5349955A (en) * | 1976-10-18 | 1978-05-06 | Fuji Photo Film Co Ltd | Spin coating method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4831874A (en:Method) * | 1971-08-27 | 1973-04-26 |
-
1973
- 1973-10-15 JP JP11605573A patent/JPS5536183B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5067578A (en:Method) | 1975-06-06 |