JPS5534931B2 - - Google Patents
Info
- Publication number
- JPS5534931B2 JPS5534931B2 JP14699876A JP14699876A JPS5534931B2 JP S5534931 B2 JPS5534931 B2 JP S5534931B2 JP 14699876 A JP14699876 A JP 14699876A JP 14699876 A JP14699876 A JP 14699876A JP S5534931 B2 JPS5534931 B2 JP S5534931B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14699876A JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14699876A JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5370817A JPS5370817A (en) | 1978-06-23 |
| JPS5534931B2 true JPS5534931B2 (en) | 1980-09-10 |
Family
ID=15420271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14699876A Granted JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5370817A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5616126A (en) * | 1979-07-18 | 1981-02-16 | Fujitsu Ltd | Exposing method |
| JPH02269348A (en) * | 1989-04-10 | 1990-11-02 | Sumitomo Chem Co Ltd | Photoresist composition |
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1976
- 1976-12-07 JP JP14699876A patent/JPS5370817A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5370817A (en) | 1978-06-23 |