JPS5370817A - Improved photoregist composite - Google Patents
Improved photoregist compositeInfo
- Publication number
- JPS5370817A JPS5370817A JP14699876A JP14699876A JPS5370817A JP S5370817 A JPS5370817 A JP S5370817A JP 14699876 A JP14699876 A JP 14699876A JP 14699876 A JP14699876 A JP 14699876A JP S5370817 A JPS5370817 A JP S5370817A
- Authority
- JP
- Japan
- Prior art keywords
- photoregist
- composite
- improved
- photoregist composite
- improved photoregist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14699876A JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14699876A JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5370817A true JPS5370817A (en) | 1978-06-23 |
JPS5534931B2 JPS5534931B2 (en) | 1980-09-10 |
Family
ID=15420271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14699876A Granted JPS5370817A (en) | 1976-12-07 | 1976-12-07 | Improved photoregist composite |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5370817A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616126A (en) * | 1979-07-18 | 1981-02-16 | Fujitsu Ltd | Exposing method |
JPH02269348A (en) * | 1989-04-10 | 1990-11-02 | Sumitomo Chem Co Ltd | Photoresist composition |
-
1976
- 1976-12-07 JP JP14699876A patent/JPS5370817A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616126A (en) * | 1979-07-18 | 1981-02-16 | Fujitsu Ltd | Exposing method |
JPH02269348A (en) * | 1989-04-10 | 1990-11-02 | Sumitomo Chem Co Ltd | Photoresist composition |
Also Published As
Publication number | Publication date |
---|---|
JPS5534931B2 (en) | 1980-09-10 |
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