JPS5370817A - Improved photoregist composite - Google Patents

Improved photoregist composite

Info

Publication number
JPS5370817A
JPS5370817A JP14699876A JP14699876A JPS5370817A JP S5370817 A JPS5370817 A JP S5370817A JP 14699876 A JP14699876 A JP 14699876A JP 14699876 A JP14699876 A JP 14699876A JP S5370817 A JPS5370817 A JP S5370817A
Authority
JP
Japan
Prior art keywords
photoregist
composite
improved
photoregist composite
improved photoregist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14699876A
Other languages
Japanese (ja)
Other versions
JPS5534931B2 (en
Inventor
Shingo Asaumi
Takayuki Satou
Kouichi Kotake
Akira Yokota
Hisashi Nakane
Shiyouzou Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO OUKA KOUGIYOU KK
Original Assignee
TOKYO OUKA KOUGIYOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO OUKA KOUGIYOU KK filed Critical TOKYO OUKA KOUGIYOU KK
Priority to JP14699876A priority Critical patent/JPS5370817A/en
Publication of JPS5370817A publication Critical patent/JPS5370817A/en
Publication of JPS5534931B2 publication Critical patent/JPS5534931B2/ja
Granted legal-status Critical Current

Links

JP14699876A 1976-12-07 1976-12-07 Improved photoregist composite Granted JPS5370817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14699876A JPS5370817A (en) 1976-12-07 1976-12-07 Improved photoregist composite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14699876A JPS5370817A (en) 1976-12-07 1976-12-07 Improved photoregist composite

Publications (2)

Publication Number Publication Date
JPS5370817A true JPS5370817A (en) 1978-06-23
JPS5534931B2 JPS5534931B2 (en) 1980-09-10

Family

ID=15420271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14699876A Granted JPS5370817A (en) 1976-12-07 1976-12-07 Improved photoregist composite

Country Status (1)

Country Link
JP (1) JPS5370817A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616126A (en) * 1979-07-18 1981-02-16 Fujitsu Ltd Exposing method
JPH02269348A (en) * 1989-04-10 1990-11-02 Sumitomo Chem Co Ltd Photoresist composition

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5616126A (en) * 1979-07-18 1981-02-16 Fujitsu Ltd Exposing method
JPH02269348A (en) * 1989-04-10 1990-11-02 Sumitomo Chem Co Ltd Photoresist composition

Also Published As

Publication number Publication date
JPS5534931B2 (en) 1980-09-10

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