JPS5533919U - - Google Patents
Info
- Publication number
- JPS5533919U JPS5533919U JP11532078U JP11532078U JPS5533919U JP S5533919 U JPS5533919 U JP S5533919U JP 11532078 U JP11532078 U JP 11532078U JP 11532078 U JP11532078 U JP 11532078U JP S5533919 U JPS5533919 U JP S5533919U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978115320U JPS584920Y2 (ja) | 1978-08-23 | 1978-08-23 | 酸化亜鉛薄膜の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978115320U JPS584920Y2 (ja) | 1978-08-23 | 1978-08-23 | 酸化亜鉛薄膜の製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5533919U true JPS5533919U (ko) | 1980-03-05 |
| JPS584920Y2 JPS584920Y2 (ja) | 1983-01-27 |
Family
ID=29066846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978115320U Expired JPS584920Y2 (ja) | 1978-08-23 | 1978-08-23 | 酸化亜鉛薄膜の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584920Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989763A (ja) * | 1983-09-28 | 1984-05-24 | Ricoh Co Ltd | 薄膜蒸着装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (ko) * | 1972-07-29 | 1974-03-28 | ||
| JPS5152041U (ko) * | 1974-10-18 | 1976-04-20 | ||
| JPS5489983A (en) * | 1977-12-28 | 1979-07-17 | Toshiba Corp | Device and method for vacuum deposition compound |
-
1978
- 1978-08-23 JP JP1978115320U patent/JPS584920Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (ko) * | 1972-07-29 | 1974-03-28 | ||
| JPS5152041U (ko) * | 1974-10-18 | 1976-04-20 | ||
| JPS5489983A (en) * | 1977-12-28 | 1979-07-17 | Toshiba Corp | Device and method for vacuum deposition compound |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5989763A (ja) * | 1983-09-28 | 1984-05-24 | Ricoh Co Ltd | 薄膜蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584920Y2 (ja) | 1983-01-27 |