JPS5533695Y2 - - Google Patents

Info

Publication number
JPS5533695Y2
JPS5533695Y2 JP7992275U JP7992275U JPS5533695Y2 JP S5533695 Y2 JPS5533695 Y2 JP S5533695Y2 JP 7992275 U JP7992275 U JP 7992275U JP 7992275 U JP7992275 U JP 7992275U JP S5533695 Y2 JPS5533695 Y2 JP S5533695Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7992275U
Other languages
Japanese (ja)
Other versions
JPS51160047U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7992275U priority Critical patent/JPS5533695Y2/ja
Publication of JPS51160047U publication Critical patent/JPS51160047U/ja
Application granted granted Critical
Publication of JPS5533695Y2 publication Critical patent/JPS5533695Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Phase Differences (AREA)
JP7992275U 1975-06-12 1975-06-12 Expired JPS5533695Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7992275U JPS5533695Y2 (cg-RX-API-DMAC10.html) 1975-06-12 1975-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7992275U JPS5533695Y2 (cg-RX-API-DMAC10.html) 1975-06-12 1975-06-12

Publications (2)

Publication Number Publication Date
JPS51160047U JPS51160047U (cg-RX-API-DMAC10.html) 1976-12-20
JPS5533695Y2 true JPS5533695Y2 (cg-RX-API-DMAC10.html) 1980-08-11

Family

ID=28558219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7992275U Expired JPS5533695Y2 (cg-RX-API-DMAC10.html) 1975-06-12 1975-06-12

Country Status (1)

Country Link
JP (1) JPS5533695Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4910859B2 (ja) * 2007-04-20 2012-04-04 横河電機株式会社 半導体検査装置

Also Published As

Publication number Publication date
JPS51160047U (cg-RX-API-DMAC10.html) 1976-12-20

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