JPS5533001B2 - - Google Patents

Info

Publication number
JPS5533001B2
JPS5533001B2 JP9497772A JP9497772A JPS5533001B2 JP S5533001 B2 JPS5533001 B2 JP S5533001B2 JP 9497772 A JP9497772 A JP 9497772A JP 9497772 A JP9497772 A JP 9497772A JP S5533001 B2 JPS5533001 B2 JP S5533001B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9497772A
Other languages
Japanese (ja)
Other versions
JPS4953067A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9497772A priority Critical patent/JPS5533001B2/ja
Publication of JPS4953067A publication Critical patent/JPS4953067A/ja
Publication of JPS5533001B2 publication Critical patent/JPS5533001B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9497772A 1972-09-20 1972-09-20 Expired JPS5533001B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9497772A JPS5533001B2 (de) 1972-09-20 1972-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9497772A JPS5533001B2 (de) 1972-09-20 1972-09-20

Publications (2)

Publication Number Publication Date
JPS4953067A JPS4953067A (de) 1974-05-23
JPS5533001B2 true JPS5533001B2 (de) 1980-08-28

Family

ID=14124953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9497772A Expired JPS5533001B2 (de) 1972-09-20 1972-09-20

Country Status (1)

Country Link
JP (1) JPS5533001B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022232Y2 (de) * 1987-01-27 1990-01-19

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2622787C2 (de) * 1976-05-21 1978-05-18 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur interferometrischen Abstands-, Dicken- oder Ebenheitsmessung
DE3001881A1 (de) * 1980-01-19 1981-08-06 Basf Ag Verfahren und vorrichtungen zur oberflaechenanalyse von flexiblen materialien
JPS58221104A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd 表面形状測定方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022232Y2 (de) * 1987-01-27 1990-01-19

Also Published As

Publication number Publication date
JPS4953067A (de) 1974-05-23

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