JPS5533001B2 - - Google Patents
Info
- Publication number
- JPS5533001B2 JPS5533001B2 JP9497772A JP9497772A JPS5533001B2 JP S5533001 B2 JPS5533001 B2 JP S5533001B2 JP 9497772 A JP9497772 A JP 9497772A JP 9497772 A JP9497772 A JP 9497772A JP S5533001 B2 JPS5533001 B2 JP S5533001B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9497772A JPS5533001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-09-20 | 1972-09-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9497772A JPS5533001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-09-20 | 1972-09-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4953067A JPS4953067A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-23 |
| JPS5533001B2 true JPS5533001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-08-28 |
Family
ID=14124953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9497772A Expired JPS5533001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1972-09-20 | 1972-09-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533001B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2622787C2 (de) * | 1976-05-21 | 1978-05-18 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zur interferometrischen Abstands-, Dicken- oder Ebenheitsmessung |
| DE3001881A1 (de) * | 1980-01-19 | 1981-08-06 | Basf Ag | Verfahren und vorrichtungen zur oberflaechenanalyse von flexiblen materialien |
| JPS58221104A (ja) * | 1982-06-18 | 1983-12-22 | Hitachi Ltd | 表面形状測定方法および装置 |
-
1972
- 1972-09-20 JP JP9497772A patent/JPS5533001B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4953067A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-05-23 |