JPS5532025B2 - - Google Patents

Info

Publication number
JPS5532025B2
JPS5532025B2 JP1627975A JP1627975A JPS5532025B2 JP S5532025 B2 JPS5532025 B2 JP S5532025B2 JP 1627975 A JP1627975 A JP 1627975A JP 1627975 A JP1627975 A JP 1627975A JP S5532025 B2 JPS5532025 B2 JP S5532025B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1627975A
Other languages
Japanese (ja)
Other versions
JPS5192188A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50016279A priority Critical patent/JPS5192188A/ja
Publication of JPS5192188A publication Critical patent/JPS5192188A/ja
Publication of JPS5532025B2 publication Critical patent/JPS5532025B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP50016279A 1975-02-10 1975-02-10 Handotaisochi no seizohoho Granted JPS5192188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50016279A JPS5192188A (en) 1975-02-10 1975-02-10 Handotaisochi no seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50016279A JPS5192188A (en) 1975-02-10 1975-02-10 Handotaisochi no seizohoho

Publications (2)

Publication Number Publication Date
JPS5192188A JPS5192188A (en) 1976-08-12
JPS5532025B2 true JPS5532025B2 (Direct) 1980-08-22

Family

ID=11912096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50016279A Granted JPS5192188A (en) 1975-02-10 1975-02-10 Handotaisochi no seizohoho

Country Status (1)

Country Link
JP (1) JPS5192188A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215547A (ja) * 1985-07-15 1987-01-23 Fujitsu Ltd 露光装置
JPS6221222A (ja) * 1985-07-19 1987-01-29 Matsushita Electric Ind Co Ltd 露光装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4157268A (en) * 1977-06-16 1979-06-05 International Business Machines Corporation Localized oxidation enhancement for an integrated injection logic circuit
JPS54150984A (en) * 1978-05-19 1979-11-27 Hitachi Ltd Semiconductor integrated circuit device and its manufacture
JPS5618460A (en) * 1979-07-23 1981-02-21 Toshiba Corp Semiconductor integrated circuit
JPS5715460A (en) * 1980-07-01 1982-01-26 Nec Corp Semiconductor integrated circuit device
JPS5788762A (en) * 1980-11-21 1982-06-02 Mitsubishi Electric Corp Semicomductor ic
JPS58200568A (ja) * 1982-05-19 1983-11-22 Hitachi Ltd 半導体集積回路装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516488A (Direct) * 1974-07-05 1976-01-20 Hitachi Ltd

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215547A (ja) * 1985-07-15 1987-01-23 Fujitsu Ltd 露光装置
JPS6221222A (ja) * 1985-07-19 1987-01-29 Matsushita Electric Ind Co Ltd 露光装置

Also Published As

Publication number Publication date
JPS5192188A (en) 1976-08-12

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