JPS5530662B2 - - Google Patents
Info
- Publication number
- JPS5530662B2 JPS5530662B2 JP4128275A JP4128275A JPS5530662B2 JP S5530662 B2 JPS5530662 B2 JP S5530662B2 JP 4128275 A JP4128275 A JP 4128275A JP 4128275 A JP4128275 A JP 4128275A JP S5530662 B2 JPS5530662 B2 JP S5530662B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4128275A JPS51116671A (en) | 1975-04-07 | 1975-04-07 | Scanning type electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4128275A JPS51116671A (en) | 1975-04-07 | 1975-04-07 | Scanning type electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51116671A JPS51116671A (en) | 1976-10-14 |
| JPS5530662B2 true JPS5530662B2 (en) | 1980-08-12 |
Family
ID=12604080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4128275A Granted JPS51116671A (en) | 1975-04-07 | 1975-04-07 | Scanning type electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51116671A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5419657U (en) * | 1977-07-11 | 1979-02-08 | ||
| JPS5419658U (en) * | 1977-07-11 | 1979-02-08 | ||
| JPS6237182Y2 (en) * | 1978-05-09 | 1987-09-22 | ||
| JPS5589256U (en) * | 1978-12-15 | 1980-06-20 | ||
| JP2602287B2 (en) * | 1988-07-01 | 1997-04-23 | 株式会社日立製作所 | X-ray mask defect inspection method and apparatus |
-
1975
- 1975-04-07 JP JP4128275A patent/JPS51116671A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51116671A (en) | 1976-10-14 |