JPS5419658U - - Google Patents
Info
- Publication number
- JPS5419658U JPS5419658U JP1977091918U JP9191877U JPS5419658U JP S5419658 U JPS5419658 U JP S5419658U JP 1977091918 U JP1977091918 U JP 1977091918U JP 9191877 U JP9191877 U JP 9191877U JP S5419658 U JPS5419658 U JP S5419658U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977091918U JPS5419658U (en) | 1977-07-11 | 1977-07-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977091918U JPS5419658U (en) | 1977-07-11 | 1977-07-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5419658U true JPS5419658U (en) | 1979-02-08 |
Family
ID=29021623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977091918U Pending JPS5419658U (en) | 1977-07-11 | 1977-07-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5419658U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020059114A1 (en) * | 2018-09-21 | 2020-03-26 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
JP2022028851A (en) * | 2018-09-21 | 2022-02-16 | 株式会社日立ハイテク | Charged particle beam device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48147U (en) * | 1971-05-24 | 1973-01-05 | ||
JPS5199538A (en) * | 1975-02-28 | 1976-09-02 | Hitachi Ltd | HIKARIDO DENTAI |
JPS51116671A (en) * | 1975-04-07 | 1976-10-14 | Hitachi Ltd | Scanning type electron microscope |
-
1977
- 1977-07-11 JP JP1977091918U patent/JPS5419658U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS48147U (en) * | 1971-05-24 | 1973-01-05 | ||
JPS5199538A (en) * | 1975-02-28 | 1976-09-02 | Hitachi Ltd | HIKARIDO DENTAI |
JPS51116671A (en) * | 1975-04-07 | 1976-10-14 | Hitachi Ltd | Scanning type electron microscope |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020059114A1 (en) * | 2018-09-21 | 2020-03-26 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
JPWO2020059114A1 (en) * | 2018-09-21 | 2021-08-30 | 株式会社日立ハイテク | Charged particle beam device |
JP2022028851A (en) * | 2018-09-21 | 2022-02-16 | 株式会社日立ハイテク | Charged particle beam device |