JPS5530656B2 - - Google Patents
Info
- Publication number
- JPS5530656B2 JPS5530656B2 JP5169574A JP5169574A JPS5530656B2 JP S5530656 B2 JPS5530656 B2 JP S5530656B2 JP 5169574 A JP5169574 A JP 5169574A JP 5169574 A JP5169574 A JP 5169574A JP S5530656 B2 JPS5530656 B2 JP S5530656B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Semiconductor Memories (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US43025774A | 1974-01-02 | 1974-01-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5099677A JPS5099677A (https=) | 1975-08-07 |
| JPS5530656B2 true JPS5530656B2 (https=) | 1980-08-12 |
Family
ID=23706754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5169574A Expired JPS5530656B2 (https=) | 1974-01-02 | 1974-05-09 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5530656B2 (https=) |
| CA (1) | CA1044744A (https=) |
| DE (1) | DE2420789C3 (https=) |
| FR (1) | FR2256529B1 (https=) |
| GB (1) | GB1478594A (https=) |
| IT (1) | IT1021128B (https=) |
| NL (1) | NL7407172A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190077633A (ko) * | 2014-12-01 | 2019-07-03 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 제조 프로세스에 관련된 진단 정보를 획득하기 위한 방법 및 장치, 진단 장치를 포함하는 리소그래피 처리 시스템 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849378A (https=) * | 1971-10-22 | 1973-07-12 | ||
| JPS49118366A (https=) * | 1973-03-10 | 1974-11-12 |
-
1974
- 1974-04-08 CA CA197,028A patent/CA1044744A/en not_active Expired
- 1974-04-29 DE DE19742420789 patent/DE2420789C3/de not_active Expired
- 1974-05-09 JP JP5169574A patent/JPS5530656B2/ja not_active Expired
- 1974-05-15 FR FR7416924A patent/FR2256529B1/fr not_active Expired
- 1974-05-29 NL NL7407172A patent/NL7407172A/xx not_active Application Discontinuation
- 1974-06-07 GB GB2000174A patent/GB1478594A/en not_active Expired
- 1974-09-06 IT IT2700074A patent/IT1021128B/it active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190077633A (ko) * | 2014-12-01 | 2019-07-03 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 제조 프로세스에 관련된 진단 정보를 획득하기 위한 방법 및 장치, 진단 장치를 포함하는 리소그래피 처리 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1478594A (en) | 1977-07-06 |
| IT1021128B (it) | 1978-01-30 |
| DE2420789B2 (de) | 1979-12-06 |
| CA1044744A (en) | 1978-12-19 |
| JPS5099677A (https=) | 1975-08-07 |
| FR2256529A1 (https=) | 1975-07-25 |
| DE2420789A1 (de) | 1975-07-10 |
| NL7407172A (nl) | 1975-07-04 |
| DE2420789C3 (de) | 1980-08-21 |
| FR2256529B1 (https=) | 1979-01-26 |