JPS5099677A - - Google Patents

Info

Publication number
JPS5099677A
JPS5099677A JP5169574A JP5169574A JPS5099677A JP S5099677 A JPS5099677 A JP S5099677A JP 5169574 A JP5169574 A JP 5169574A JP 5169574 A JP5169574 A JP 5169574A JP S5099677 A JPS5099677 A JP S5099677A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5169574A
Other languages
Japanese (ja)
Other versions
JPS5530656B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5099677A publication Critical patent/JPS5099677A/ja
Publication of JPS5530656B2 publication Critical patent/JPS5530656B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36Photoelectric screens; Charge-storage screens
    • H01J29/39Charge-storage screens

Landscapes

  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Semiconductor Memories (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
JP5169574A 1974-01-02 1974-05-09 Expired JPS5530656B2 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43025774A 1974-01-02 1974-01-02

Publications (2)

Publication Number Publication Date
JPS5099677A true JPS5099677A (https=) 1975-08-07
JPS5530656B2 JPS5530656B2 (https=) 1980-08-12

Family

ID=23706754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5169574A Expired JPS5530656B2 (https=) 1974-01-02 1974-05-09

Country Status (7)

Country Link
JP (1) JPS5530656B2 (https=)
CA (1) CA1044744A (https=)
DE (1) DE2420789C3 (https=)
FR (1) FR2256529B1 (https=)
GB (1) GB1478594A (https=)
IT (1) IT1021128B (https=)
NL (1) NL7407172A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10241418B2 (en) * 2014-12-01 2019-03-26 Asml Netherlands B.V. Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849378A (https=) * 1971-10-22 1973-07-12
JPS49118366A (https=) * 1973-03-10 1974-11-12

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849378A (https=) * 1971-10-22 1973-07-12
JPS49118366A (https=) * 1973-03-10 1974-11-12

Also Published As

Publication number Publication date
GB1478594A (en) 1977-07-06
IT1021128B (it) 1978-01-30
DE2420789B2 (de) 1979-12-06
CA1044744A (en) 1978-12-19
FR2256529A1 (https=) 1975-07-25
DE2420789A1 (de) 1975-07-10
NL7407172A (nl) 1975-07-04
JPS5530656B2 (https=) 1980-08-12
DE2420789C3 (de) 1980-08-21
FR2256529B1 (https=) 1979-01-26

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