JPS5529269B2 - - Google Patents
Info
- Publication number
- JPS5529269B2 JPS5529269B2 JP5553874A JP5553874A JPS5529269B2 JP S5529269 B2 JPS5529269 B2 JP S5529269B2 JP 5553874 A JP5553874 A JP 5553874A JP 5553874 A JP5553874 A JP 5553874A JP S5529269 B2 JPS5529269 B2 JP S5529269B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5553874A JPS5529269B2 (en:Method) | 1974-05-20 | 1974-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5553874A JPS5529269B2 (en:Method) | 1974-05-20 | 1974-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50148916A JPS50148916A (en:Method) | 1975-11-28 |
| JPS5529269B2 true JPS5529269B2 (en:Method) | 1980-08-02 |
Family
ID=13001486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5553874A Expired JPS5529269B2 (en:Method) | 1974-05-20 | 1974-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5529269B2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5967590U (ja) * | 1982-10-27 | 1984-05-08 | 松下電子工業株式会社 | 高真空排気装置 |
-
1974
- 1974-05-20 JP JP5553874A patent/JPS5529269B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50148916A (en:Method) | 1975-11-28 |