JPS552890B2 - - Google Patents

Info

Publication number
JPS552890B2
JPS552890B2 JP2393976A JP2393976A JPS552890B2 JP S552890 B2 JPS552890 B2 JP S552890B2 JP 2393976 A JP2393976 A JP 2393976A JP 2393976 A JP2393976 A JP 2393976A JP S552890 B2 JPS552890 B2 JP S552890B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2393976A
Other languages
Japanese (ja)
Other versions
JPS52106671A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2393976A priority Critical patent/JPS52106671A/ja
Publication of JPS52106671A publication Critical patent/JPS52106671A/ja
Publication of JPS552890B2 publication Critical patent/JPS552890B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP2393976A 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth Granted JPS52106671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2393976A JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2393976A JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Publications (2)

Publication Number Publication Date
JPS52106671A JPS52106671A (en) 1977-09-07
JPS552890B2 true JPS552890B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-22

Family

ID=12124488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2393976A Granted JPS52106671A (en) 1976-03-05 1976-03-05 Device of liquid phase eptaxial growth

Country Status (1)

Country Link
JP (1) JPS52106671A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184865U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-05-18 1982-11-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184865U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-05-18 1982-11-24

Also Published As

Publication number Publication date
JPS52106671A (en) 1977-09-07

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