JPS5528434A - Tunnel kiln - Google Patents

Tunnel kiln

Info

Publication number
JPS5528434A
JPS5528434A JP10091878A JP10091878A JPS5528434A JP S5528434 A JPS5528434 A JP S5528434A JP 10091878 A JP10091878 A JP 10091878A JP 10091878 A JP10091878 A JP 10091878A JP S5528434 A JPS5528434 A JP S5528434A
Authority
JP
Japan
Prior art keywords
tunnel kiln
kiln
tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10091878A
Other languages
Japanese (ja)
Other versions
JPS616315B2 (en
Inventor
Teruyuki Satou
Yuunosuke Itsupongi
Riyouichi Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP10091878A priority Critical patent/JPS5528434A/en
Publication of JPS5528434A publication Critical patent/JPS5528434A/en
Publication of JPS616315B2 publication Critical patent/JPS616315B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Tunnel Furnaces (AREA)
JP10091878A 1978-08-21 1978-08-21 Tunnel kiln Granted JPS5528434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10091878A JPS5528434A (en) 1978-08-21 1978-08-21 Tunnel kiln

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10091878A JPS5528434A (en) 1978-08-21 1978-08-21 Tunnel kiln

Publications (2)

Publication Number Publication Date
JPS5528434A true JPS5528434A (en) 1980-02-29
JPS616315B2 JPS616315B2 (en) 1986-02-25

Family

ID=14286711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10091878A Granted JPS5528434A (en) 1978-08-21 1978-08-21 Tunnel kiln

Country Status (1)

Country Link
JP (1) JPS5528434A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136368A (en) * 1981-02-17 1982-08-23 Fujitsu Ltd Manufacture of mis transistor
JPS6183873A (en) * 1984-09-28 1986-04-28 ロザイ工業株式会社 Tunnel kiln
JPS63128660A (en) * 1986-11-18 1988-06-01 Sanyo Electric Co Ltd Manufacture of cmos semiconductor device
JP2006500545A (en) * 2002-09-26 2006-01-05 ビーティーユー インターナショナル インコーポレイテッド Improvement of temperature distribution in convection heating furnace.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136368A (en) * 1981-02-17 1982-08-23 Fujitsu Ltd Manufacture of mis transistor
JPS6183873A (en) * 1984-09-28 1986-04-28 ロザイ工業株式会社 Tunnel kiln
JPS63128660A (en) * 1986-11-18 1988-06-01 Sanyo Electric Co Ltd Manufacture of cmos semiconductor device
JP2006500545A (en) * 2002-09-26 2006-01-05 ビーティーユー インターナショナル インコーポレイテッド Improvement of temperature distribution in convection heating furnace.

Also Published As

Publication number Publication date
JPS616315B2 (en) 1986-02-25

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