JPS5528424B2 - - Google Patents
Info
- Publication number
- JPS5528424B2 JPS5528424B2 JP4964173A JP4964173A JPS5528424B2 JP S5528424 B2 JPS5528424 B2 JP S5528424B2 JP 4964173 A JP4964173 A JP 4964173A JP 4964173 A JP4964173 A JP 4964173A JP S5528424 B2 JPS5528424 B2 JP S5528424B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4964173A JPS5528424B2 (en) | 1973-05-02 | 1973-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4964173A JPS5528424B2 (en) | 1973-05-02 | 1973-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5011185A JPS5011185A (en) | 1975-02-05 |
| JPS5528424B2 true JPS5528424B2 (en) | 1980-07-28 |
Family
ID=12836824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4964173A Expired JPS5528424B2 (en) | 1973-05-02 | 1973-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5528424B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100252212B1 (en) * | 1997-03-31 | 2000-04-15 | 윤종용 | Etchant for etching silicon nitride layer for semiconductor manufacturing and apparatus thereof |
| KR100327342B1 (en) * | 1999-10-27 | 2002-03-06 | 윤종용 | Composite etchant for a nitride etching in a semiconductor process and an etching method using the same etchant |
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1973
- 1973-05-02 JP JP4964173A patent/JPS5528424B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5011185A (en) | 1975-02-05 |