JPS5528419B2 - - Google Patents

Info

Publication number
JPS5528419B2
JPS5528419B2 JP6012273A JP6012273A JPS5528419B2 JP S5528419 B2 JPS5528419 B2 JP S5528419B2 JP 6012273 A JP6012273 A JP 6012273A JP 6012273 A JP6012273 A JP 6012273A JP S5528419 B2 JPS5528419 B2 JP S5528419B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6012273A
Other versions
JPS5011386A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6012273A priority Critical patent/JPS5528419B2/ja
Publication of JPS5011386A publication Critical patent/JPS5011386A/ja
Publication of JPS5528419B2 publication Critical patent/JPS5528419B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP6012273A 1973-05-29 1973-05-29 Expired JPS5528419B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6012273A JPS5528419B2 (ja) 1973-05-29 1973-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6012273A JPS5528419B2 (ja) 1973-05-29 1973-05-29

Publications (2)

Publication Number Publication Date
JPS5011386A JPS5011386A (ja) 1975-02-05
JPS5528419B2 true JPS5528419B2 (ja) 1980-07-28

Family

ID=13132992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6012273A Expired JPS5528419B2 (ja) 1973-05-29 1973-05-29

Country Status (1)

Country Link
JP (1) JPS5528419B2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51126070A (en) * 1975-04-25 1976-11-02 Hitachi Ltd Weber treatment equipment
JPS5297066U (ja) * 1976-01-19 1977-07-20
JPS5372472U (ja) * 1976-11-18 1978-06-17
JPS53146358U (ja) * 1977-04-22 1978-11-17
JPS57196532A (en) * 1981-05-27 1982-12-02 Toshiba Corp Drying device for wafer
JPS58203630A (ja) * 1982-05-20 1983-11-28 Fujitsu Ltd デイスクの乾燥方法

Also Published As

Publication number Publication date
JPS5011386A (ja) 1975-02-05

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