JPS5528419B2 - - Google Patents
Info
- Publication number
- JPS5528419B2 JPS5528419B2 JP6012273A JP6012273A JPS5528419B2 JP S5528419 B2 JPS5528419 B2 JP S5528419B2 JP 6012273 A JP6012273 A JP 6012273A JP 6012273 A JP6012273 A JP 6012273A JP S5528419 B2 JPS5528419 B2 JP S5528419B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6012273A JPS5528419B2 (ja) | 1973-05-29 | 1973-05-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6012273A JPS5528419B2 (ja) | 1973-05-29 | 1973-05-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5011386A JPS5011386A (ja) | 1975-02-05 |
JPS5528419B2 true JPS5528419B2 (ja) | 1980-07-28 |
Family
ID=13132992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6012273A Expired JPS5528419B2 (ja) | 1973-05-29 | 1973-05-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5528419B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51126070A (en) * | 1975-04-25 | 1976-11-02 | Hitachi Ltd | Weber treatment equipment |
JPS5297066U (ja) * | 1976-01-19 | 1977-07-20 | ||
JPS5372472U (ja) * | 1976-11-18 | 1978-06-17 | ||
JPS53146358U (ja) * | 1977-04-22 | 1978-11-17 | ||
JPS57196532A (en) * | 1981-05-27 | 1982-12-02 | Toshiba Corp | Drying device for wafer |
JPS58203630A (ja) * | 1982-05-20 | 1983-11-28 | Fujitsu Ltd | デイスクの乾燥方法 |
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1973
- 1973-05-29 JP JP6012273A patent/JPS5528419B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5011386A (ja) | 1975-02-05 |