JPS5528414B2 - - Google Patents

Info

Publication number
JPS5528414B2
JPS5528414B2 JP5752072A JP5752072A JPS5528414B2 JP S5528414 B2 JPS5528414 B2 JP S5528414B2 JP 5752072 A JP5752072 A JP 5752072A JP 5752072 A JP5752072 A JP 5752072A JP S5528414 B2 JPS5528414 B2 JP S5528414B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5752072A
Other languages
Japanese (ja)
Other versions
JPS4918472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5752072A priority Critical patent/JPS5528414B2/ja
Publication of JPS4918472A publication Critical patent/JPS4918472A/ja
Publication of JPS5528414B2 publication Critical patent/JPS5528414B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5752072A 1972-06-09 1972-06-09 Expired JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5752072A JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-09 1972-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5752072A JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-09 1972-06-09

Publications (2)

Publication Number Publication Date
JPS4918472A JPS4918472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-18
JPS5528414B2 true JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-28

Family

ID=13057997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5752072A Expired JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-09 1972-06-09

Country Status (1)

Country Link
JP (1) JPS5528414B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191955A (en) * 1975-02-10 1976-08-12 Tomeiseino suguretahoripuropirenseishiitono seizohoho
JPS5346366U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-09-27 1978-04-20
JPS54157478A (en) * 1978-06-01 1979-12-12 Canon Inc Alignment method
US4357540A (en) * 1980-12-19 1982-11-02 International Business Machines Corporation Semiconductor device array mask inspection method and apparatus
JPS5818713A (ja) * 1981-07-25 1983-02-03 Nippon Kogaku Kk <Nikon> 円板物体の位置決め装置
BG50611A3 (bg) * 1989-03-29 1992-09-15 Chisso Corp Непрозрачен формован продукт и метод за получаването му
JPH0637572B2 (ja) * 1990-02-20 1994-05-18 チッソ株式会社 真珠様光沢を有する延伸成形物およびその製造方法
JP6127834B2 (ja) * 2013-08-27 2017-05-17 トヨタ自動車株式会社 アライメント方法及びパターニング用マスク

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3497705A (en) * 1968-02-12 1970-02-24 Itek Corp Mask alignment system using radial patterns and flying spot scanning

Also Published As

Publication number Publication date
JPS4918472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-02-18

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