JPS5527468B2 - - Google Patents

Info

Publication number
JPS5527468B2
JPS5527468B2 JP9923375A JP9923375A JPS5527468B2 JP S5527468 B2 JPS5527468 B2 JP S5527468B2 JP 9923375 A JP9923375 A JP 9923375A JP 9923375 A JP9923375 A JP 9923375A JP S5527468 B2 JPS5527468 B2 JP S5527468B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9923375A
Other languages
Japanese (ja)
Other versions
JPS5222887A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50099233A priority Critical patent/JPS5222887A/ja
Publication of JPS5222887A publication Critical patent/JPS5222887A/ja
Publication of JPS5527468B2 publication Critical patent/JPS5527468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP50099233A 1975-08-14 1975-08-14 Semiconductor unit manufacturing system Granted JPS5222887A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50099233A JPS5222887A (en) 1975-08-14 1975-08-14 Semiconductor unit manufacturing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50099233A JPS5222887A (en) 1975-08-14 1975-08-14 Semiconductor unit manufacturing system

Publications (2)

Publication Number Publication Date
JPS5222887A JPS5222887A (en) 1977-02-21
JPS5527468B2 true JPS5527468B2 (enExample) 1980-07-21

Family

ID=14241950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50099233A Granted JPS5222887A (en) 1975-08-14 1975-08-14 Semiconductor unit manufacturing system

Country Status (1)

Country Link
JP (1) JPS5222887A (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837230A (enExample) * 1971-09-16 1973-06-01
JPS4855663A (enExample) * 1971-11-10 1973-08-04

Also Published As

Publication number Publication date
JPS5222887A (en) 1977-02-21

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