JPS552732B2 - - Google Patents
Info
- Publication number
- JPS552732B2 JPS552732B2 JP15644476A JP15644476A JPS552732B2 JP S552732 B2 JPS552732 B2 JP S552732B2 JP 15644476 A JP15644476 A JP 15644476A JP 15644476 A JP15644476 A JP 15644476A JP S552732 B2 JPS552732 B2 JP S552732B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15644476A JPS5380964A (en) | 1976-12-27 | 1976-12-27 | Forming process of substrate for integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15644476A JPS5380964A (en) | 1976-12-27 | 1976-12-27 | Forming process of substrate for integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5380964A JPS5380964A (en) | 1978-07-17 |
| JPS552732B2 true JPS552732B2 (cs) | 1980-01-22 |
Family
ID=15627873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15644476A Granted JPS5380964A (en) | 1976-12-27 | 1976-12-27 | Forming process of substrate for integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5380964A (cs) |
-
1976
- 1976-12-27 JP JP15644476A patent/JPS5380964A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5380964A (en) | 1978-07-17 |