JPS5526464A - Calibration method of radiation thermometer - Google Patents

Calibration method of radiation thermometer

Info

Publication number
JPS5526464A
JPS5526464A JP9967178A JP9967178A JPS5526464A JP S5526464 A JPS5526464 A JP S5526464A JP 9967178 A JP9967178 A JP 9967178A JP 9967178 A JP9967178 A JP 9967178A JP S5526464 A JPS5526464 A JP S5526464A
Authority
JP
Japan
Prior art keywords
mirror
furnace
thermometer
calibration
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9967178A
Other languages
Japanese (ja)
Inventor
Kiyoshi Tamura
Tadaaki Iwamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP9967178A priority Critical patent/JPS5526464A/en
Publication of JPS5526464A publication Critical patent/JPS5526464A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G01J5/53—Reference sources, e.g. standard lamps; Black bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0275—Control or determination of height or distance or angle information for sensors or receivers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To make an accurate calibration possible even for a radiation thermometer having a measuring diameter larger than the target diameter of a radiator by using the magnified virtual image of the radiator for calibration generated by a concave mirror. CONSTITUTION:Black body furnace 10 is arranged with a slight inclination for the center axis of concave mirror 16, and mirror 16 is provided in the light path between standard thermometer 12 and calibrated thermometer 14 which are arranged in both sides of furnace 10. Various conditions of furnace 10 are so set that an isotropic black body radiation can be obtained sufficiently in the solid for all the surface of the concave mirror, and the reflection factor of mirror 16 is enhanced by subjecting the concave sphere of metal or glass to gold plating, and the hollow target part of furnace 10 is placed in the focal distance of mirror 16, and 1 to 10 magnifications can be obtained by adjusting the distance between them. In case of calibration, mirror 16 is rotated to measure the temperature of magnified virtual image 24 in the hollow of furnace 10 by thermometers 12 and 14, thereby calibratting thermometer 14.
JP9967178A 1978-08-15 1978-08-15 Calibration method of radiation thermometer Pending JPS5526464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9967178A JPS5526464A (en) 1978-08-15 1978-08-15 Calibration method of radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9967178A JPS5526464A (en) 1978-08-15 1978-08-15 Calibration method of radiation thermometer

Publications (1)

Publication Number Publication Date
JPS5526464A true JPS5526464A (en) 1980-02-25

Family

ID=14253489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9967178A Pending JPS5526464A (en) 1978-08-15 1978-08-15 Calibration method of radiation thermometer

Country Status (1)

Country Link
JP (1) JPS5526464A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4907895A (en) * 1988-03-31 1990-03-13 Ivac Corporation Optical chopper for infrared thermometer
US4969748A (en) * 1989-04-13 1990-11-13 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4907895A (en) * 1988-03-31 1990-03-13 Ivac Corporation Optical chopper for infrared thermometer
US4969748A (en) * 1989-04-13 1990-11-13 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing

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