JPS5526047U - - Google Patents

Info

Publication number
JPS5526047U
JPS5526047U JP10831278U JP10831278U JPS5526047U JP S5526047 U JPS5526047 U JP S5526047U JP 10831278 U JP10831278 U JP 10831278U JP 10831278 U JP10831278 U JP 10831278U JP S5526047 U JPS5526047 U JP S5526047U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10831278U
Other languages
Japanese (ja)
Other versions
JPS58696Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978108312U priority Critical patent/JPS58696Y2/ja
Publication of JPS5526047U publication Critical patent/JPS5526047U/ja
Application granted granted Critical
Publication of JPS58696Y2 publication Critical patent/JPS58696Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1978108312U 1978-08-07 1978-08-07 試料処理装置 Expired JPS58696Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978108312U JPS58696Y2 (ja) 1978-08-07 1978-08-07 試料処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978108312U JPS58696Y2 (ja) 1978-08-07 1978-08-07 試料処理装置

Publications (2)

Publication Number Publication Date
JPS5526047U true JPS5526047U (enrdf_load_stackoverflow) 1980-02-20
JPS58696Y2 JPS58696Y2 (ja) 1983-01-07

Family

ID=29053238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978108312U Expired JPS58696Y2 (ja) 1978-08-07 1978-08-07 試料処理装置

Country Status (1)

Country Link
JP (1) JPS58696Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS59177367A (ja) * 1983-03-25 1984-10-08 Matsushita Electric Ind Co Ltd 試料搬送機構を有する真空蒸着装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839152A (enrdf_load_stackoverflow) * 1971-09-22 1973-06-08
JPS4852683A (enrdf_load_stackoverflow) * 1971-11-08 1973-07-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839152A (enrdf_load_stackoverflow) * 1971-09-22 1973-06-08
JPS4852683A (enrdf_load_stackoverflow) * 1971-11-08 1973-07-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS59177367A (ja) * 1983-03-25 1984-10-08 Matsushita Electric Ind Co Ltd 試料搬送機構を有する真空蒸着装置

Also Published As

Publication number Publication date
JPS58696Y2 (ja) 1983-01-07

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