JPS5525486B2 - - Google Patents

Info

Publication number
JPS5525486B2
JPS5525486B2 JP6757272A JP6757272A JPS5525486B2 JP S5525486 B2 JPS5525486 B2 JP S5525486B2 JP 6757272 A JP6757272 A JP 6757272A JP 6757272 A JP6757272 A JP 6757272A JP S5525486 B2 JPS5525486 B2 JP S5525486B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6757272A
Other languages
Japanese (ja)
Other versions
JPS4926748A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6757272A priority Critical patent/JPS5525486B2/ja
Publication of JPS4926748A publication Critical patent/JPS4926748A/ja
Publication of JPS5525486B2 publication Critical patent/JPS5525486B2/ja
Expired legal-status Critical Current

Links

JP6757272A 1972-07-07 1972-07-07 Expired JPS5525486B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (enrdf_load_stackoverflow) 1972-07-07 1972-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6757272A JPS5525486B2 (enrdf_load_stackoverflow) 1972-07-07 1972-07-07

Publications (2)

Publication Number Publication Date
JPS4926748A JPS4926748A (enrdf_load_stackoverflow) 1974-03-09
JPS5525486B2 true JPS5525486B2 (enrdf_load_stackoverflow) 1980-07-07

Family

ID=13348787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6757272A Expired JPS5525486B2 (enrdf_load_stackoverflow) 1972-07-07 1972-07-07

Country Status (1)

Country Link
JP (1) JPS5525486B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551109U (enrdf_load_stackoverflow) * 1978-09-29 1980-04-04

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524817Y2 (enrdf_load_stackoverflow) * 1974-05-29 1980-06-14
JPS62198119A (ja) * 1986-02-25 1987-09-01 Morita Mfg Co Ltd 硼素拡散方法並びにその装置
CA1244969A (en) * 1986-10-29 1988-11-15 Mitel Corporation Method for diffusing p-type material using boron disks
JPH0277118A (ja) * 1988-09-13 1990-03-16 Shin Etsu Handotai Co Ltd 半導体ウェーハへの硼素拡散方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4029370Y1 (enrdf_load_stackoverflow) * 1963-10-30 1965-10-13
JPS4111901Y1 (enrdf_load_stackoverflow) * 1964-03-19 1966-06-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551109U (enrdf_load_stackoverflow) * 1978-09-29 1980-04-04

Also Published As

Publication number Publication date
JPS4926748A (enrdf_load_stackoverflow) 1974-03-09

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