JPS5524931B2 - - Google Patents
Info
- Publication number
- JPS5524931B2 JPS5524931B2 JP9175975A JP9175975A JPS5524931B2 JP S5524931 B2 JPS5524931 B2 JP S5524931B2 JP 9175975 A JP9175975 A JP 9175975A JP 9175975 A JP9175975 A JP 9175975A JP S5524931 B2 JPS5524931 B2 JP S5524931B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50091759A JPS5215479A (en) | 1975-07-28 | 1975-07-28 | Apparatus for adsorption and removal of harmful gases |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50091759A JPS5215479A (en) | 1975-07-28 | 1975-07-28 | Apparatus for adsorption and removal of harmful gases |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5215479A JPS5215479A (en) | 1977-02-05 |
| JPS5524931B2 true JPS5524931B2 (en, 2012) | 1980-07-02 |
Family
ID=14035460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50091759A Granted JPS5215479A (en) | 1975-07-28 | 1975-07-28 | Apparatus for adsorption and removal of harmful gases |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5215479A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11226341A (ja) * | 1998-02-18 | 1999-08-24 | Ebara Corp | 気体の浄化方法及び装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6544483B1 (en) * | 1999-03-25 | 2003-04-08 | Korea M.A.T. Co., Ltd. | Adsorbent gas scrubber to dispose the gas generated during the semiconductor manufacturing process |
| JP6204728B2 (ja) * | 2013-07-10 | 2017-09-27 | 日立オートモティブシステムズメジャメント株式会社 | ベーパ回収装置 |
-
1975
- 1975-07-28 JP JP50091759A patent/JPS5215479A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11226341A (ja) * | 1998-02-18 | 1999-08-24 | Ebara Corp | 気体の浄化方法及び装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5215479A (en) | 1977-02-05 |