JPS5522140U - - Google Patents

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Publication number
JPS5522140U
JPS5522140U JP10441178U JP10441178U JPS5522140U JP S5522140 U JPS5522140 U JP S5522140U JP 10441178 U JP10441178 U JP 10441178U JP 10441178 U JP10441178 U JP 10441178U JP S5522140 U JPS5522140 U JP S5522140U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10441178U
Other languages
Japanese (ja)
Other versions
JPS5742174Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978104411U priority Critical patent/JPS5742174Y2/ja
Publication of JPS5522140U publication Critical patent/JPS5522140U/ja
Application granted granted Critical
Publication of JPS5742174Y2 publication Critical patent/JPS5742174Y2/ja
Expired legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
JP1978104411U 1978-07-28 1978-07-28 Expired JPS5742174Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978104411U JPS5742174Y2 (enrdf_load_stackoverflow) 1978-07-28 1978-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978104411U JPS5742174Y2 (enrdf_load_stackoverflow) 1978-07-28 1978-07-28

Publications (2)

Publication Number Publication Date
JPS5522140U true JPS5522140U (enrdf_load_stackoverflow) 1980-02-13
JPS5742174Y2 JPS5742174Y2 (enrdf_load_stackoverflow) 1982-09-17

Family

ID=29045778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978104411U Expired JPS5742174Y2 (enrdf_load_stackoverflow) 1978-07-28 1978-07-28

Country Status (1)

Country Link
JP (1) JPS5742174Y2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107860U (enrdf_load_stackoverflow) * 1984-12-19 1986-07-08
JPS61215289A (ja) * 1985-03-19 1986-09-25 Toshiba Mach Co Ltd 気相成長装置
JPH01168030A (ja) * 1987-12-24 1989-07-03 Touyoko Kagaku Kk 減圧気相成長方法
JPH0245631U (enrdf_load_stackoverflow) * 1988-09-24 1990-03-29
WO2004093173A1 (ja) * 2003-04-14 2004-10-28 Shin-Etsu Handotai Co. Ltd. サセプタ及び気相成長装置
JP2010245396A (ja) * 2009-04-08 2010-10-28 Sumco Corp Ｓｏｉウェーハの製造方法及び貼り合わせ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (enrdf_load_stackoverflow) * 1973-06-04 1975-02-10
JPS52146174A (en) * 1976-05-29 1977-12-05 Toshiba Corp Susceptor for vapor growth of semiconductor
JPS5378765A (en) * 1976-12-23 1978-07-12 Toshiba Corp Semiconductor wafer heating stand for gas phase growth

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012971A (enrdf_load_stackoverflow) * 1973-06-04 1975-02-10
JPS52146174A (en) * 1976-05-29 1977-12-05 Toshiba Corp Susceptor for vapor growth of semiconductor
JPS5378765A (en) * 1976-12-23 1978-07-12 Toshiba Corp Semiconductor wafer heating stand for gas phase growth

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107860U (enrdf_load_stackoverflow) * 1984-12-19 1986-07-08
JPS61215289A (ja) * 1985-03-19 1986-09-25 Toshiba Mach Co Ltd 気相成長装置
JPH01168030A (ja) * 1987-12-24 1989-07-03 Touyoko Kagaku Kk 減圧気相成長方法
JPH0245631U (enrdf_load_stackoverflow) * 1988-09-24 1990-03-29
WO2004093173A1 (ja) * 2003-04-14 2004-10-28 Shin-Etsu Handotai Co. Ltd. サセプタ及び気相成長装置
JP2010245396A (ja) * 2009-04-08 2010-10-28 Sumco Corp Ｓｏｉウェーハの製造方法及び貼り合わせ装置

Also Published As

Publication number Publication date
JPS5742174Y2 (enrdf_load_stackoverflow) 1982-09-17

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