JPS5522018B2 - - Google Patents
Info
- Publication number
- JPS5522018B2 JPS5522018B2 JP14574475A JP14574475A JPS5522018B2 JP S5522018 B2 JPS5522018 B2 JP S5522018B2 JP 14574475 A JP14574475 A JP 14574475A JP 14574475 A JP14574475 A JP 14574475A JP S5522018 B2 JPS5522018 B2 JP S5522018B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14574475A JPS5269270A (en) | 1975-12-05 | 1975-12-05 | Coating method of photoresist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14574475A JPS5269270A (en) | 1975-12-05 | 1975-12-05 | Coating method of photoresist |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5269270A JPS5269270A (en) | 1977-06-08 |
JPS5522018B2 true JPS5522018B2 (en) | 1980-06-13 |
Family
ID=15392134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14574475A Granted JPS5269270A (en) | 1975-12-05 | 1975-12-05 | Coating method of photoresist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5269270A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5460568A (en) * | 1977-10-24 | 1979-05-16 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
US4244799A (en) * | 1978-09-11 | 1981-01-13 | Bell Telephone Laboratories, Incorporated | Fabrication of integrated circuits utilizing thick high-resolution patterns |
JPS5618420A (en) * | 1979-07-23 | 1981-02-21 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6132469A (en) * | 1984-07-24 | 1986-02-15 | Toppan Printing Co Ltd | Color solid-state image pickup element |
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1975
- 1975-12-05 JP JP14574475A patent/JPS5269270A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5269270A (en) | 1977-06-08 |