JPS5522018B2 - - Google Patents

Info

Publication number
JPS5522018B2
JPS5522018B2 JP14574475A JP14574475A JPS5522018B2 JP S5522018 B2 JPS5522018 B2 JP S5522018B2 JP 14574475 A JP14574475 A JP 14574475A JP 14574475 A JP14574475 A JP 14574475A JP S5522018 B2 JPS5522018 B2 JP S5522018B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14574475A
Other languages
Japanese (ja)
Other versions
JPS5269270A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14574475A priority Critical patent/JPS5269270A/en
Publication of JPS5269270A publication Critical patent/JPS5269270A/en
Publication of JPS5522018B2 publication Critical patent/JPS5522018B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14574475A 1975-12-05 1975-12-05 Coating method of photoresist Granted JPS5269270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14574475A JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14574475A JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Publications (2)

Publication Number Publication Date
JPS5269270A JPS5269270A (en) 1977-06-08
JPS5522018B2 true JPS5522018B2 (en) 1980-06-13

Family

ID=15392134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14574475A Granted JPS5269270A (en) 1975-12-05 1975-12-05 Coating method of photoresist

Country Status (1)

Country Link
JP (1) JPS5269270A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460568A (en) * 1977-10-24 1979-05-16 Nec Home Electronics Ltd Manufacture of semiconductor device
US4244799A (en) * 1978-09-11 1981-01-13 Bell Telephone Laboratories, Incorporated Fabrication of integrated circuits utilizing thick high-resolution patterns
JPS5618420A (en) * 1979-07-23 1981-02-21 Fujitsu Ltd Manufacture of semiconductor device
JPS6132469A (en) * 1984-07-24 1986-02-15 Toppan Printing Co Ltd Color solid-state image pickup element

Also Published As

Publication number Publication date
JPS5269270A (en) 1977-06-08

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