JPS5520743Y2 - - Google Patents

Info

Publication number
JPS5520743Y2
JPS5520743Y2 JP1974126151U JP12615174U JPS5520743Y2 JP S5520743 Y2 JPS5520743 Y2 JP S5520743Y2 JP 1974126151 U JP1974126151 U JP 1974126151U JP 12615174 U JP12615174 U JP 12615174U JP S5520743 Y2 JPS5520743 Y2 JP S5520743Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974126151U
Other languages
Japanese (ja)
Other versions
JPS5154143U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974126151U priority Critical patent/JPS5520743Y2/ja
Publication of JPS5154143U publication Critical patent/JPS5154143U/ja
Application granted granted Critical
Publication of JPS5520743Y2 publication Critical patent/JPS5520743Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1974126151U 1974-10-21 1974-10-21 Expired JPS5520743Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 (enrdf_load_stackoverflow) 1974-10-21 1974-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 (enrdf_load_stackoverflow) 1974-10-21 1974-10-21

Publications (2)

Publication Number Publication Date
JPS5154143U JPS5154143U (enrdf_load_stackoverflow) 1976-04-24
JPS5520743Y2 true JPS5520743Y2 (enrdf_load_stackoverflow) 1980-05-19

Family

ID=28377884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974126151U Expired JPS5520743Y2 (enrdf_load_stackoverflow) 1974-10-21 1974-10-21

Country Status (1)

Country Link
JP (1) JPS5520743Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0816263B2 (ja) * 1986-05-28 1996-02-21 洋一 村山 電子ビ−ム蒸発イオンプレ−テイングとその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS549592B2 (enrdf_load_stackoverflow) * 1972-07-29 1979-04-25

Also Published As

Publication number Publication date
JPS5154143U (enrdf_load_stackoverflow) 1976-04-24

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