JPS5520743Y2 - - Google Patents
Info
- Publication number
- JPS5520743Y2 JPS5520743Y2 JP1974126151U JP12615174U JPS5520743Y2 JP S5520743 Y2 JPS5520743 Y2 JP S5520743Y2 JP 1974126151 U JP1974126151 U JP 1974126151U JP 12615174 U JP12615174 U JP 12615174U JP S5520743 Y2 JPS5520743 Y2 JP S5520743Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974126151U JPS5520743Y2 (cs) | 1974-10-21 | 1974-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974126151U JPS5520743Y2 (cs) | 1974-10-21 | 1974-10-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5154143U JPS5154143U (cs) | 1976-04-24 |
| JPS5520743Y2 true JPS5520743Y2 (cs) | 1980-05-19 |
Family
ID=28377884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974126151U Expired JPS5520743Y2 (cs) | 1974-10-21 | 1974-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5520743Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0816263B2 (ja) * | 1986-05-28 | 1996-02-21 | 洋一 村山 | 電子ビ−ム蒸発イオンプレ−テイングとその装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS549592B2 (cs) * | 1972-07-29 | 1979-04-25 |
-
1974
- 1974-10-21 JP JP1974126151U patent/JPS5520743Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5154143U (cs) | 1976-04-24 |