JPS5154143U - - Google Patents

Info

Publication number
JPS5154143U
JPS5154143U JP12615174U JP12615174U JPS5154143U JP S5154143 U JPS5154143 U JP S5154143U JP 12615174 U JP12615174 U JP 12615174U JP 12615174 U JP12615174 U JP 12615174U JP S5154143 U JPS5154143 U JP S5154143U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12615174U
Other languages
Japanese (ja)
Other versions
JPS5520743Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974126151U priority Critical patent/JPS5520743Y2/ja
Publication of JPS5154143U publication Critical patent/JPS5154143U/ja
Application granted granted Critical
Publication of JPS5520743Y2 publication Critical patent/JPS5520743Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1974126151U 1974-10-21 1974-10-21 Expired JPS5520743Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 (cs) 1974-10-21 1974-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974126151U JPS5520743Y2 (cs) 1974-10-21 1974-10-21

Publications (2)

Publication Number Publication Date
JPS5154143U true JPS5154143U (cs) 1976-04-24
JPS5520743Y2 JPS5520743Y2 (cs) 1980-05-19

Family

ID=28377884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974126151U Expired JPS5520743Y2 (cs) 1974-10-21 1974-10-21

Country Status (1)

Country Link
JP (1) JPS5520743Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (cs) * 1972-07-29 1974-03-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (cs) * 1972-07-29 1974-03-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62280357A (ja) * 1986-05-28 1987-12-05 Yoichi Murayama 電子ビ−ム蒸発イオンプレ−テイングとその装置

Also Published As

Publication number Publication date
JPS5520743Y2 (cs) 1980-05-19

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