JPS5520377B2 - - Google Patents

Info

Publication number
JPS5520377B2
JPS5520377B2 JP12595276A JP12595276A JPS5520377B2 JP S5520377 B2 JPS5520377 B2 JP S5520377B2 JP 12595276 A JP12595276 A JP 12595276A JP 12595276 A JP12595276 A JP 12595276A JP S5520377 B2 JPS5520377 B2 JP S5520377B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12595276A
Other languages
Japanese (ja)
Other versions
JPS5350972A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12595276A priority Critical patent/JPS5350972A/ja
Publication of JPS5350972A publication Critical patent/JPS5350972A/ja
Publication of JPS5520377B2 publication Critical patent/JPS5520377B2/ja
Granted legal-status Critical Current

Links

JP12595276A 1976-10-20 1976-10-20 Closed tube for heat treatment of multi-element semiconductor Granted JPS5350972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12595276A JPS5350972A (en) 1976-10-20 1976-10-20 Closed tube for heat treatment of multi-element semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12595276A JPS5350972A (en) 1976-10-20 1976-10-20 Closed tube for heat treatment of multi-element semiconductor

Publications (2)

Publication Number Publication Date
JPS5350972A JPS5350972A (en) 1978-05-09
JPS5520377B2 true JPS5520377B2 (ru) 1980-06-02

Family

ID=14923023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12595276A Granted JPS5350972A (en) 1976-10-20 1976-10-20 Closed tube for heat treatment of multi-element semiconductor

Country Status (1)

Country Link
JP (1) JPS5350972A (ru)

Also Published As

Publication number Publication date
JPS5350972A (en) 1978-05-09

Similar Documents

Publication Publication Date Title
JPS5545084B2 (ru)
FR2373788B1 (ru)
DE2604219C2 (ru)
JPS555236B2 (ru)
JPS52116065U (ru)
JPS5631458Y2 (ru)
DE2620434C3 (ru)
FR2342269B1 (ru)
DE2657009B2 (ru)
JPS52108113U (ru)
JPS5635620Y2 (ru)
DE2637401C3 (ru)
JPS5520377B2 (ru)
DE2611211A1 (ru)
CS178383B1 (ru)
JPS52156343U (ru)
JPS52105644U (ru)
JPS51117572U (ru)
JPS52163905U (ru)
JPS52169826U (ru)
JPS5314788U (ru)
JPS5333485U (ru)
JPS5368383U (ru)
JPS52153715U (ru)
DE2607848A1 (ru)