JPS5520377B2 - - Google Patents
Info
- Publication number
- JPS5520377B2 JPS5520377B2 JP12595276A JP12595276A JPS5520377B2 JP S5520377 B2 JPS5520377 B2 JP S5520377B2 JP 12595276 A JP12595276 A JP 12595276A JP 12595276 A JP12595276 A JP 12595276A JP S5520377 B2 JPS5520377 B2 JP S5520377B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12595276A JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12595276A JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5350972A JPS5350972A (en) | 1978-05-09 |
JPS5520377B2 true JPS5520377B2 (ru) | 1980-06-02 |
Family
ID=14923023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12595276A Granted JPS5350972A (en) | 1976-10-20 | 1976-10-20 | Closed tube for heat treatment of multi-element semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5350972A (ru) |
-
1976
- 1976-10-20 JP JP12595276A patent/JPS5350972A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5350972A (en) | 1978-05-09 |