JPS5518876B2 - - Google Patents
Info
- Publication number
- JPS5518876B2 JPS5518876B2 JP9451576A JP9451576A JPS5518876B2 JP S5518876 B2 JPS5518876 B2 JP S5518876B2 JP 9451576 A JP9451576 A JP 9451576A JP 9451576 A JP9451576 A JP 9451576A JP S5518876 B2 JPS5518876 B2 JP S5518876B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9451576A JPS5320376A (en) | 1976-08-10 | 1976-08-10 | Large dose radiation measuring system of wide dose region |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9451576A JPS5320376A (en) | 1976-08-10 | 1976-08-10 | Large dose radiation measuring system of wide dose region |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5320376A JPS5320376A (en) | 1978-02-24 |
JPS5518876B2 true JPS5518876B2 (en) | 1980-05-22 |
Family
ID=14112450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9451576A Granted JPS5320376A (en) | 1976-08-10 | 1976-08-10 | Large dose radiation measuring system of wide dose region |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320376A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02275631A (en) * | 1989-01-11 | 1990-11-09 | Dainippon Screen Mfg Co Ltd | Method and device for washing and treating substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3086117A (en) * | 1959-07-20 | 1963-04-16 | Raytheon Co | Semiconductive dosimeters |
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1976
- 1976-08-10 JP JP9451576A patent/JPS5320376A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3086117A (en) * | 1959-07-20 | 1963-04-16 | Raytheon Co | Semiconductive dosimeters |
Also Published As
Publication number | Publication date |
---|---|
JPS5320376A (en) | 1978-02-24 |