JPS55181340U - - Google Patents
Info
- Publication number
- JPS55181340U JPS55181340U JP8061379U JP8061379U JPS55181340U JP S55181340 U JPS55181340 U JP S55181340U JP 8061379 U JP8061379 U JP 8061379U JP 8061379 U JP8061379 U JP 8061379U JP S55181340 U JPS55181340 U JP S55181340U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8061379U JPS55181340U (show.php) | 1979-06-12 | 1979-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8061379U JPS55181340U (show.php) | 1979-06-12 | 1979-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55181340U true JPS55181340U (show.php) | 1980-12-26 |
Family
ID=29313946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8061379U Pending JPS55181340U (show.php) | 1979-06-12 | 1979-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55181340U (show.php) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63187630A (ja) * | 1987-01-30 | 1988-08-03 | Toshiba Corp | 半導体ウエ−ハの液処理装置 |
| JP2015177109A (ja) * | 2014-03-17 | 2015-10-05 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法および基板処理装置 |
-
1979
- 1979-06-12 JP JP8061379U patent/JPS55181340U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63187630A (ja) * | 1987-01-30 | 1988-08-03 | Toshiba Corp | 半導体ウエ−ハの液処理装置 |
| JP2015177109A (ja) * | 2014-03-17 | 2015-10-05 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法および基板処理装置 |