JPS55172370U - - Google Patents
Info
- Publication number
- JPS55172370U JPS55172370U JP7012079U JP7012079U JPS55172370U JP S55172370 U JPS55172370 U JP S55172370U JP 7012079 U JP7012079 U JP 7012079U JP 7012079 U JP7012079 U JP 7012079U JP S55172370 U JPS55172370 U JP S55172370U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7012079U JPS594045Y2 (ja) | 1979-05-23 | 1979-05-23 | 薄膜生成用イオン化装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7012079U JPS594045Y2 (ja) | 1979-05-23 | 1979-05-23 | 薄膜生成用イオン化装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55172370U true JPS55172370U (enExample) | 1980-12-10 |
| JPS594045Y2 JPS594045Y2 (ja) | 1984-02-04 |
Family
ID=29303884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7012079U Expired JPS594045Y2 (ja) | 1979-05-23 | 1979-05-23 | 薄膜生成用イオン化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS594045Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5996261A (ja) * | 1982-11-22 | 1984-06-02 | Agency Of Ind Science & Technol | 薄膜作成装置 |
-
1979
- 1979-05-23 JP JP7012079U patent/JPS594045Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5996261A (ja) * | 1982-11-22 | 1984-06-02 | Agency Of Ind Science & Technol | 薄膜作成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS594045Y2 (ja) | 1984-02-04 |