JPS55172370U - - Google Patents

Info

Publication number
JPS55172370U
JPS55172370U JP7012079U JP7012079U JPS55172370U JP S55172370 U JPS55172370 U JP S55172370U JP 7012079 U JP7012079 U JP 7012079U JP 7012079 U JP7012079 U JP 7012079U JP S55172370 U JPS55172370 U JP S55172370U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7012079U
Other languages
Japanese (ja)
Other versions
JPS594045Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7012079U priority Critical patent/JPS594045Y2/ja
Publication of JPS55172370U publication Critical patent/JPS55172370U/ja
Application granted granted Critical
Publication of JPS594045Y2 publication Critical patent/JPS594045Y2/ja
Expired legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP7012079U 1979-05-23 1979-05-23 薄膜生成用イオン化装置 Expired JPS594045Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7012079U JPS594045Y2 (ja) 1979-05-23 1979-05-23 薄膜生成用イオン化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7012079U JPS594045Y2 (ja) 1979-05-23 1979-05-23 薄膜生成用イオン化装置

Publications (2)

Publication Number Publication Date
JPS55172370U true JPS55172370U (enrdf_load_stackoverflow) 1980-12-10
JPS594045Y2 JPS594045Y2 (ja) 1984-02-04

Family

ID=29303884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7012079U Expired JPS594045Y2 (ja) 1979-05-23 1979-05-23 薄膜生成用イオン化装置

Country Status (1)

Country Link
JP (1) JPS594045Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996261A (ja) * 1982-11-22 1984-06-02 Agency Of Ind Science & Technol 薄膜作成装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5996261A (ja) * 1982-11-22 1984-06-02 Agency Of Ind Science & Technol 薄膜作成装置

Also Published As

Publication number Publication date
JPS594045Y2 (ja) 1984-02-04

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