JPS5517105B2 - - Google Patents

Info

Publication number
JPS5517105B2
JPS5517105B2 JP14203674A JP14203674A JPS5517105B2 JP S5517105 B2 JPS5517105 B2 JP S5517105B2 JP 14203674 A JP14203674 A JP 14203674A JP 14203674 A JP14203674 A JP 14203674A JP S5517105 B2 JPS5517105 B2 JP S5517105B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14203674A
Other languages
Japanese (ja)
Other versions
JPS5169488A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14203674A priority Critical patent/JPS5169488A/ja
Publication of JPS5169488A publication Critical patent/JPS5169488A/ja
Publication of JPS5517105B2 publication Critical patent/JPS5517105B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14203674A 1974-12-12 1974-12-12 Himakukeiseisochi Granted JPS5169488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14203674A JPS5169488A (ja) 1974-12-12 1974-12-12 Himakukeiseisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14203674A JPS5169488A (ja) 1974-12-12 1974-12-12 Himakukeiseisochi

Publications (2)

Publication Number Publication Date
JPS5169488A JPS5169488A (ja) 1976-06-16
JPS5517105B2 true JPS5517105B2 (enExample) 1980-05-09

Family

ID=15305868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14203674A Granted JPS5169488A (ja) 1974-12-12 1974-12-12 Himakukeiseisochi

Country Status (1)

Country Link
JP (1) JPS5169488A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120002U (enExample) * 1987-01-29 1988-08-03

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533918U (enExample) * 1978-08-23 1980-03-05
JPS5591970A (en) * 1978-12-28 1980-07-11 Jeol Ltd Ion plating device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5213927B2 (enExample) * 1972-07-13 1977-04-18
JPS5229991B2 (enExample) * 1973-03-20 1977-08-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120002U (enExample) * 1987-01-29 1988-08-03

Also Published As

Publication number Publication date
JPS5169488A (ja) 1976-06-16

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