JPS5517103B2 - - Google Patents

Info

Publication number
JPS5517103B2
JPS5517103B2 JP12972274A JP12972274A JPS5517103B2 JP S5517103 B2 JPS5517103 B2 JP S5517103B2 JP 12972274 A JP12972274 A JP 12972274A JP 12972274 A JP12972274 A JP 12972274A JP S5517103 B2 JPS5517103 B2 JP S5517103B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12972274A
Other languages
Japanese (ja)
Other versions
JPS5155787A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12972274A priority Critical patent/JPS5155787A/ja
Publication of JPS5155787A publication Critical patent/JPS5155787A/ja
Publication of JPS5517103B2 publication Critical patent/JPS5517103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12972274A 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi Granted JPS5155787A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12972274A JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12972274A JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Publications (2)

Publication Number Publication Date
JPS5155787A JPS5155787A (en) 1976-05-17
JPS5517103B2 true JPS5517103B2 (enrdf_load_stackoverflow) 1980-05-09

Family

ID=15016569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12972274A Granted JPS5155787A (en) 1974-11-11 1974-11-11 Shinkujochakuhoho oyobi sochi

Country Status (1)

Country Link
JP (1) JPS5155787A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135882A (en) * 1975-05-20 1976-11-25 Osaka Kouon Denki Kk Process for supplying continu ously evaporating substance
JPS5623329Y2 (enrdf_load_stackoverflow) * 1977-07-08 1981-06-01

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516410B2 (enrdf_load_stackoverflow) * 1971-09-30 1976-02-27

Also Published As

Publication number Publication date
JPS5155787A (en) 1976-05-17

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