JPS55162942U - - Google Patents
Info
- Publication number
- JPS55162942U JPS55162942U JP1979062674U JP6267479U JPS55162942U JP S55162942 U JPS55162942 U JP S55162942U JP 1979062674 U JP1979062674 U JP 1979062674U JP 6267479 U JP6267479 U JP 6267479U JP S55162942 U JPS55162942 U JP S55162942U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
- C30B31/103—Mechanisms for moving either the charge or heater
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979062674U JPS6032761Y2 (ja) | 1979-05-11 | 1979-05-11 | 石英ボ−ト |
| DE8080900836T DE3069784D1 (en) | 1979-05-11 | 1980-05-09 | Boat for conveying semiconductor substrates |
| US06/227,075 US4389967A (en) | 1979-05-11 | 1980-05-09 | Boat for carrying semiconductor substrates |
| PCT/JP1980/000099 WO1980002622A1 (en) | 1979-05-11 | 1980-05-09 | Boat for conveying semiconductor substrates |
| EP80900836A EP0028266B1 (en) | 1979-05-11 | 1980-12-01 | Boat for conveying semiconductor substrates |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979062674U JPS6032761Y2 (ja) | 1979-05-11 | 1979-05-11 | 石英ボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55162942U true JPS55162942U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-11-22 |
| JPS6032761Y2 JPS6032761Y2 (ja) | 1985-09-30 |
Family
ID=13207060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979062674U Expired JPS6032761Y2 (ja) | 1979-05-11 | 1979-05-11 | 石英ボ−ト |
Country Status (5)
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4540326A (en) * | 1982-09-17 | 1985-09-10 | Nacom Industries, Inc. | Semiconductor wafer transport system |
| US4682927A (en) * | 1982-09-17 | 1987-07-28 | Nacom Industries, Incorporated | Conveyor system |
| US4461617A (en) * | 1982-10-25 | 1984-07-24 | Asq Boats, Inc. | Carrier for semiconductors |
| US4428975A (en) | 1983-01-28 | 1984-01-31 | Motorola, Inc. | Process for improving nitride deposition on a semiconductor wafer |
| US4515104A (en) * | 1983-05-13 | 1985-05-07 | Asq Boats, Inc. | Contiguous wafer boat |
| US4486465A (en) * | 1983-09-30 | 1984-12-04 | Motorola, Inc. | Method for deposition on a semiconductor wafer |
| US4593644A (en) * | 1983-10-26 | 1986-06-10 | Rca Corporation | Continuous in-line deposition system |
| KR890702241A (ko) * | 1987-07-02 | 1989-12-23 | 스탄 게이어 | 경질 삽입체를 넣은 보강 캐리어(Reinforced Carrier with Embedded Rigid Insert) |
| US4930634A (en) * | 1987-09-29 | 1990-06-05 | Fluoroware, Inc. | Carrier for flat panel displays |
| US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
| DE4019611A1 (de) * | 1990-06-20 | 1992-01-02 | Schaefer Franz W | Transporteinheit fuer leiterplatten |
| US5111936A (en) * | 1990-11-30 | 1992-05-12 | Fluoroware | Wafer carrier |
| JP2787914B2 (ja) * | 1996-06-27 | 1998-08-20 | 日本電気株式会社 | 半導体ウェーハの保管方法及び保管容器 |
| US6468903B2 (en) | 2000-11-15 | 2002-10-22 | Asm International N.V. | Pre-treatment of reactor parts for chemical vapor deposition reactors |
| US6825051B2 (en) * | 2002-05-17 | 2004-11-30 | Asm America, Inc. | Plasma etch resistant coating and process |
| US6974781B2 (en) * | 2003-10-20 | 2005-12-13 | Asm International N.V. | Reactor precoating for reduced stress and uniform CVD |
| US9067792B1 (en) | 2006-11-03 | 2015-06-30 | Semlux Technologies, Inc. | Laser conversion of high purity silicon powder to densified granular forms |
| US10211326B2 (en) * | 2016-03-31 | 2019-02-19 | Stmicroelectronics (Tours) Sas | Vertical power component |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4089992A (en) * | 1965-10-11 | 1978-05-16 | International Business Machines Corporation | Method for depositing continuous pinhole free silicon nitride films and products produced thereby |
| US4089735A (en) * | 1968-06-05 | 1978-05-16 | Siemens Aktiengesellschaft | Method for epitactic precipitation of crystalline material from a gaseous phase, particularly for semiconductors |
| DE1957952A1 (de) * | 1969-11-18 | 1971-05-27 | Siemens Ag | Siliciumnitridbeschichtung an Quarzwaenden fuer Diffusions- und Oxydationsreaktoren |
| JPS4944509Y1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1970-01-27 | 1974-12-05 | ||
| US3640398A (en) * | 1970-03-30 | 1972-02-08 | Edward J Mellen Jr | Wafer boat |
| US3705714A (en) * | 1971-05-20 | 1972-12-12 | Norton Co | Silicon nitride kiln furniture |
| JPS5140424A (ja) * | 1975-07-09 | 1976-04-05 | Teijin Ltd | Chukukanjogatafukugoseni |
| JPS52135063U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1976-04-09 | 1977-10-14 |
-
1979
- 1979-05-11 JP JP1979062674U patent/JPS6032761Y2/ja not_active Expired
-
1980
- 1980-05-09 WO PCT/JP1980/000099 patent/WO1980002622A1/ja active IP Right Grant
- 1980-05-09 US US06/227,075 patent/US4389967A/en not_active Expired - Fee Related
- 1980-05-09 DE DE8080900836T patent/DE3069784D1/de not_active Expired
- 1980-12-01 EP EP80900836A patent/EP0028266B1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0028266B1 (en) | 1984-12-12 |
| EP0028266A1 (en) | 1981-05-13 |
| JPS6032761Y2 (ja) | 1985-09-30 |
| DE3069784D1 (en) | 1985-01-24 |
| EP0028266A4 (en) | 1981-08-27 |
| US4389967A (en) | 1983-06-28 |
| WO1980002622A1 (en) | 1980-11-27 |