JPS55159806A - Recovery apparatus of floated solvent - Google Patents
Recovery apparatus of floated solventInfo
- Publication number
- JPS55159806A JPS55159806A JP6699979A JP6699979A JPS55159806A JP S55159806 A JPS55159806 A JP S55159806A JP 6699979 A JP6699979 A JP 6699979A JP 6699979 A JP6699979 A JP 6699979A JP S55159806 A JPS55159806 A JP S55159806A
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- floated
- cylinder
- freezing plate
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treating Waste Gases (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6699979A JPS55159806A (en) | 1979-05-30 | 1979-05-30 | Recovery apparatus of floated solvent |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6699979A JPS55159806A (en) | 1979-05-30 | 1979-05-30 | Recovery apparatus of floated solvent |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55159806A true JPS55159806A (en) | 1980-12-12 |
JPS5760043B2 JPS5760043B2 (ja) | 1982-12-17 |
Family
ID=13332204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6699979A Granted JPS55159806A (en) | 1979-05-30 | 1979-05-30 | Recovery apparatus of floated solvent |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55159806A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216602A (ja) * | 1986-03-18 | 1987-09-24 | Fujitsu Ltd | 有機溶剤回収方法 |
JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |
-
1979
- 1979-05-30 JP JP6699979A patent/JPS55159806A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62216602A (ja) * | 1986-03-18 | 1987-09-24 | Fujitsu Ltd | 有機溶剤回収方法 |
JP2001321601A (ja) * | 2000-05-12 | 2001-11-20 | Sony Corp | 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5760043B2 (ja) | 1982-12-17 |
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