JPS55159806A - Recovery apparatus of floated solvent - Google Patents

Recovery apparatus of floated solvent

Info

Publication number
JPS55159806A
JPS55159806A JP6699979A JP6699979A JPS55159806A JP S55159806 A JPS55159806 A JP S55159806A JP 6699979 A JP6699979 A JP 6699979A JP 6699979 A JP6699979 A JP 6699979A JP S55159806 A JPS55159806 A JP S55159806A
Authority
JP
Japan
Prior art keywords
solvent
floated
cylinder
freezing plate
introducing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6699979A
Other languages
English (en)
Other versions
JPS5760043B2 (ja
Inventor
Masami Shibuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP6699979A priority Critical patent/JPS55159806A/ja
Publication of JPS55159806A publication Critical patent/JPS55159806A/ja
Publication of JPS5760043B2 publication Critical patent/JPS5760043B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP6699979A 1979-05-30 1979-05-30 Recovery apparatus of floated solvent Granted JPS55159806A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6699979A JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6699979A JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Publications (2)

Publication Number Publication Date
JPS55159806A true JPS55159806A (en) 1980-12-12
JPS5760043B2 JPS5760043B2 (ja) 1982-12-17

Family

ID=13332204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6699979A Granted JPS55159806A (en) 1979-05-30 1979-05-30 Recovery apparatus of floated solvent

Country Status (1)

Country Link
JP (1) JPS55159806A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216602A (ja) * 1986-03-18 1987-09-24 Fujitsu Ltd 有機溶剤回収方法
JP2001321601A (ja) * 2000-05-12 2001-11-20 Sony Corp 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216602A (ja) * 1986-03-18 1987-09-24 Fujitsu Ltd 有機溶剤回収方法
JP2001321601A (ja) * 2000-05-12 2001-11-20 Sony Corp 有機溶剤排出低減方法及び有機溶剤排出低減装置、ウエハ乾燥装置

Also Published As

Publication number Publication date
JPS5760043B2 (ja) 1982-12-17

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