JPS5515546B2 - - Google Patents
Info
- Publication number
- JPS5515546B2 JPS5515546B2 JP10629376A JP10629376A JPS5515546B2 JP S5515546 B2 JPS5515546 B2 JP S5515546B2 JP 10629376 A JP10629376 A JP 10629376A JP 10629376 A JP10629376 A JP 10629376A JP S5515546 B2 JPS5515546 B2 JP S5515546B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10629376A JPS5331581A (en) | 1976-09-07 | 1976-09-07 | Coating method of tube inside by ion beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10629376A JPS5331581A (en) | 1976-09-07 | 1976-09-07 | Coating method of tube inside by ion beam |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5331581A JPS5331581A (en) | 1978-03-24 |
| JPS5515546B2 true JPS5515546B2 (de) | 1980-04-24 |
Family
ID=14429996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10629376A Granted JPS5331581A (en) | 1976-09-07 | 1976-09-07 | Coating method of tube inside by ion beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5331581A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58144472A (ja) * | 1982-02-22 | 1983-08-27 | Hitachi Ltd | イオンプレ−テイング装置 |
| JP4963992B2 (ja) * | 2007-03-15 | 2012-06-27 | スタンレー電気株式会社 | プラズマ処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4973385A (de) * | 1972-11-15 | 1974-07-16 | ||
| JPS5036381A (de) * | 1973-08-04 | 1975-04-05 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5016120U (de) * | 1973-06-13 | 1975-02-20 |
-
1976
- 1976-09-07 JP JP10629376A patent/JPS5331581A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4973385A (de) * | 1972-11-15 | 1974-07-16 | ||
| JPS5036381A (de) * | 1973-08-04 | 1975-04-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5331581A (en) | 1978-03-24 |