JPS5036381A - - Google Patents
Info
- Publication number
- JPS5036381A JPS5036381A JP8824773A JP8824773A JPS5036381A JP S5036381 A JPS5036381 A JP S5036381A JP 8824773 A JP8824773 A JP 8824773A JP 8824773 A JP8824773 A JP 8824773A JP S5036381 A JPS5036381 A JP S5036381A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8824773A JPS5318184B2 (de) | 1973-08-04 | 1973-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8824773A JPS5318184B2 (de) | 1973-08-04 | 1973-08-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5036381A true JPS5036381A (de) | 1975-04-05 |
| JPS5318184B2 JPS5318184B2 (de) | 1978-06-13 |
Family
ID=13937512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8824773A Expired JPS5318184B2 (de) | 1973-08-04 | 1973-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318184B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5331581A (en) * | 1976-09-07 | 1978-03-24 | Ulvac Corp | Coating method of tube inside by ion beam |
| JPS60200957A (ja) * | 1984-03-26 | 1985-10-11 | Futaba Corp | イオンビ−ム蒸着装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4952186A (de) * | 1972-06-16 | 1974-05-21 |
-
1973
- 1973-08-04 JP JP8824773A patent/JPS5318184B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4952186A (de) * | 1972-06-16 | 1974-05-21 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5331581A (en) * | 1976-09-07 | 1978-03-24 | Ulvac Corp | Coating method of tube inside by ion beam |
| JPS5515546B2 (de) * | 1976-09-07 | 1980-04-24 | ||
| JPS60200957A (ja) * | 1984-03-26 | 1985-10-11 | Futaba Corp | イオンビ−ム蒸着装置 |
| JPH0448869B2 (de) * | 1984-03-26 | 1992-08-07 | Futaba Denshi Kogyo Kk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5318184B2 (de) | 1978-06-13 |