JPS55149951U - - Google Patents
Info
- Publication number
- JPS55149951U JPS55149951U JP5022779U JP5022779U JPS55149951U JP S55149951 U JPS55149951 U JP S55149951U JP 5022779 U JP5022779 U JP 5022779U JP 5022779 U JP5022779 U JP 5022779U JP S55149951 U JPS55149951 U JP S55149951U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5022779U JPS55149951U (ja) | 1979-04-16 | 1979-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5022779U JPS55149951U (ja) | 1979-04-16 | 1979-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55149951U true JPS55149951U (ja) | 1980-10-29 |
Family
ID=28937300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5022779U Pending JPS55149951U (ja) | 1979-04-16 | 1979-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55149951U (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5933248U (ja) * | 1982-08-27 | 1984-03-01 | 日本真空技術株式会社 | ウエハのフアセツト合せ装置 |
| JPH0284752A (ja) * | 1988-12-20 | 1990-03-26 | Tel Sagami Ltd | ウエハ整列装置 |
| JPH08241917A (ja) * | 1995-12-14 | 1996-09-17 | Hitachi Ltd | 基板の真空処理方法及び基板真空処理装置 |
| JP2011025819A (ja) * | 2009-07-24 | 2011-02-10 | Toyota Industries Corp | 車両のバッテリ交換装置 |
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1979
- 1979-04-16 JP JP5022779U patent/JPS55149951U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5933248U (ja) * | 1982-08-27 | 1984-03-01 | 日本真空技術株式会社 | ウエハのフアセツト合せ装置 |
| JPH0284752A (ja) * | 1988-12-20 | 1990-03-26 | Tel Sagami Ltd | ウエハ整列装置 |
| JPH08241917A (ja) * | 1995-12-14 | 1996-09-17 | Hitachi Ltd | 基板の真空処理方法及び基板真空処理装置 |
| JP2011025819A (ja) * | 2009-07-24 | 2011-02-10 | Toyota Industries Corp | 車両のバッテリ交換装置 |