JPS55148772A - Regeneration of ammoniacal etching solution for copper metal etching - Google Patents

Regeneration of ammoniacal etching solution for copper metal etching

Info

Publication number
JPS55148772A
JPS55148772A JP5704180A JP5704180A JPS55148772A JP S55148772 A JPS55148772 A JP S55148772A JP 5704180 A JP5704180 A JP 5704180A JP 5704180 A JP5704180 A JP 5704180A JP S55148772 A JPS55148772 A JP S55148772A
Authority
JP
Japan
Prior art keywords
etching
regeneration
copper metal
ammoniacal
etching solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5704180A
Other languages
English (en)
Inventor
Konsutantourosu Efuchimiosu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS55148772A publication Critical patent/JPS55148772A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions
JP5704180A 1979-04-30 1980-04-28 Regeneration of ammoniacal etching solution for copper metal etching Pending JPS55148772A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792917597 DE2917597A1 (de) 1979-04-30 1979-04-30 Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer

Publications (1)

Publication Number Publication Date
JPS55148772A true JPS55148772A (en) 1980-11-19

Family

ID=6069704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5704180A Pending JPS55148772A (en) 1979-04-30 1980-04-28 Regeneration of ammoniacal etching solution for copper metal etching

Country Status (4)

Country Link
US (1) US4280887A (ja)
EP (1) EP0018592A1 (ja)
JP (1) JPS55148772A (ja)
DE (1) DE2917597A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905538A (en) * 1988-01-25 1990-03-06 Nissan Motor Co., Ltd. Camshaft

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3031567A1 (de) * 1980-08-21 1982-04-29 Elochem Ätztechnik GmbH, 7758 Meersburg Verfahren zum regenerieren einer ammoniakalischen aetzloesung
DE3237246A1 (de) * 1982-10-07 1984-04-12 Gosudarstvennyj naučno-issledovatel'skij i proektnyj institut po obogaščeniju rud cvetnych metallov KAZMECHANOBR, Alma-Ata Verfahren zur reinigung von abwaessern und loesungen und apparat zur durchfuehrung desselben
US4655895A (en) * 1982-10-07 1987-04-07 Gosudarstvenny Nauchno-Issledovatelsky I Proektny Institut Po Obogascheniju Rud Tsvetnykh Metallov "Kazmekhanobr" Apparatus for purifying effluents and liquids
DE3324450A1 (de) * 1983-07-07 1985-01-17 ELO-CHEM Ätztechnik GmbH, 7758 Meersburg Ammoniumsulfathaltige aetzloesung sowie verfahren zur regeneration der aetzloesung
US4490224A (en) * 1984-04-16 1984-12-25 Lancy International, Inc. Process for reconditioning a used ammoniacal copper etching solution containing copper solute
EP0393270A1 (en) * 1989-04-21 1990-10-24 Ming-Hsing Lee Process for etching copper with ammoniacal etchant solution and reconditioning the used etchant solution
US5348629A (en) * 1989-11-17 1994-09-20 Khudenko Boris M Method and apparatus for electrolytic processing of materials
US5133873A (en) * 1991-02-22 1992-07-28 Miles Inc. Process for removal of copper ions from aqueous effluent
US5417818A (en) * 1993-11-24 1995-05-23 Elo-Chem Atztechnik Gmbh Process for the accelerated etching and refining of metals in ammoniacal etching systems
DE69530984D1 (de) * 1994-07-19 2003-07-10 Corus Staal Bv Verfahren zum elektrochemischen Lösen eines Metalles, wie z. B. Zink oder Zinn
US5524780A (en) * 1995-01-31 1996-06-11 Applied Electroless Concepts Inc. Control of regeneration of ammoniacal copper etchant
US5626736A (en) 1996-01-19 1997-05-06 Shipley Company, L.L.C. Electroplating process
US6086779A (en) * 1999-03-01 2000-07-11 Mcgean-Rohco, Inc. Copper etching compositions and method for etching copper
US6869519B2 (en) * 2001-09-27 2005-03-22 National Institute Of Advanced Industrial Science And Technology Electrolytic process for the production of metallic copper and apparatus therefor
US20050082172A1 (en) * 2003-10-21 2005-04-21 Applied Materials, Inc. Copper replenishment for copper plating with insoluble anode
CN100378014C (zh) * 2005-02-03 2008-04-02 黄伟君 污水处理及资源回收的系统和方法
US20060193750A1 (en) * 2005-02-28 2006-08-31 Medis El Ltd. Electrochemical detection of explosives in air
CN113200635B (zh) * 2021-06-17 2022-05-10 徐鸿顺 一种电路板蚀刻废水处理装置及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6603696A (ja) * 1965-04-28 1966-10-31
BE754457A (fr) * 1969-12-09 1971-01-18 Didier Werke Ag Procede de recyclage et de recuperation des eaux de rincage obtenues apres le decapage de pieces a revetir
AT313671B (de) * 1971-03-08 1974-02-25 Hoellmueller Maschbau H Verfahren zum Regenerieren von Ätzlösungen für Kupfer und Kupferlegierungen, Regenerationsanlage zur Durchführung dieses Verfahrens sowie Meß- und Steuereinrichtung für diese Regenerationsanlage
US4035269A (en) * 1971-04-23 1977-07-12 Snam Progetti, S.P.A. Process for the galvanic purification of the waste waters
US3761369A (en) * 1971-10-18 1973-09-25 Electrodies Inc Process for the electrolytic reclamation of spent etching fluids
US3766036A (en) * 1972-03-06 1973-10-16 Occidental Petroleum Corp Process for the removal of ionic metallic impurities from water
SE387966B (sv) * 1972-09-09 1976-09-20 Loewe Opta Gmbh Sett att upparbeta helt eller delvis forbrukade kopparetsningslosningar
DE2310679A1 (de) * 1973-03-03 1974-09-05 Hoellmueller Maschbau H Vorrichtung zum reinigen von kupferhaltigen ammoniakalischen loesungen
US3999564A (en) * 1976-01-09 1976-12-28 Pesek Engineering & Mfg. Co. Continuous etching and etched material recovery system
US4152229A (en) * 1978-04-19 1979-05-01 London Laboratories Limited Apparatus and method for removal of soluble metal ions from aqueous effluent

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905538A (en) * 1988-01-25 1990-03-06 Nissan Motor Co., Ltd. Camshaft

Also Published As

Publication number Publication date
DE2917597A1 (de) 1980-11-13
EP0018592A1 (de) 1980-11-12
US4280887A (en) 1981-07-28

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