JPS5514871B2 - - Google Patents
Info
- Publication number
- JPS5514871B2 JPS5514871B2 JP9943372A JP9943372A JPS5514871B2 JP S5514871 B2 JPS5514871 B2 JP S5514871B2 JP 9943372 A JP9943372 A JP 9943372A JP 9943372 A JP9943372 A JP 9943372A JP S5514871 B2 JPS5514871 B2 JP S5514871B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9943372A JPS5514871B2 (https=) | 1972-10-05 | 1972-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9943372A JPS5514871B2 (https=) | 1972-10-05 | 1972-10-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4956810A JPS4956810A (https=) | 1974-06-03 |
| JPS5514871B2 true JPS5514871B2 (https=) | 1980-04-19 |
Family
ID=14247293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9943372A Expired JPS5514871B2 (https=) | 1972-10-05 | 1972-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5514871B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0621346B2 (ja) * | 1986-06-11 | 1994-03-23 | 日本鉱業株式会社 | 高純度金属タンタル製ターゲットの製造方法 |
-
1972
- 1972-10-05 JP JP9943372A patent/JPS5514871B2/ja not_active Expired
Non-Patent Citations (3)
| Title |
|---|
| J.ELECTRO CHEMICAL SOC.#N5=1967 * |
| JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1967 * |
| THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1971 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4956810A (https=) | 1974-06-03 |