JPS5514871B2 - - Google Patents

Info

Publication number
JPS5514871B2
JPS5514871B2 JP9943372A JP9943372A JPS5514871B2 JP S5514871 B2 JPS5514871 B2 JP S5514871B2 JP 9943372 A JP9943372 A JP 9943372A JP 9943372 A JP9943372 A JP 9943372A JP S5514871 B2 JPS5514871 B2 JP S5514871B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9943372A
Other languages
Japanese (ja)
Other versions
JPS4956810A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9943372A priority Critical patent/JPS5514871B2/ja
Publication of JPS4956810A publication Critical patent/JPS4956810A/ja
Publication of JPS5514871B2 publication Critical patent/JPS5514871B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9943372A 1972-10-05 1972-10-05 Expired JPS5514871B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9943372A JPS5514871B2 (enrdf_load_stackoverflow) 1972-10-05 1972-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9943372A JPS5514871B2 (enrdf_load_stackoverflow) 1972-10-05 1972-10-05

Publications (2)

Publication Number Publication Date
JPS4956810A JPS4956810A (enrdf_load_stackoverflow) 1974-06-03
JPS5514871B2 true JPS5514871B2 (enrdf_load_stackoverflow) 1980-04-19

Family

ID=14247293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9943372A Expired JPS5514871B2 (enrdf_load_stackoverflow) 1972-10-05 1972-10-05

Country Status (1)

Country Link
JP (1) JPS5514871B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621346B2 (ja) * 1986-06-11 1994-03-23 日本鉱業株式会社 高純度金属タンタル製ターゲットの製造方法

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
J.ELECTRO CHEMICAL SOC.#N5=1967 *
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1967 *
THE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY=1971 *

Also Published As

Publication number Publication date
JPS4956810A (enrdf_load_stackoverflow) 1974-06-03

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